FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004863912> ?p ?o ?g. }

• W2004863912 endingPage "2542" @default.
• W2004863912 startingPage "2534" @default.
• W2004863912 abstract "Plasma polymerized methylsilane (PPMS) films are promising photosensitive layers for 248 and 193 nm lithography applications. These a-Si1−xCx:H films are deposited in a low power plasma of methylsilane gas using a commercial tool. The effect of substrate temperature, pressure in the chamber and rf power injected in the source on optical properties and chemical composition of the PPMS films have been studied using spectroscopic ellipsometry and Fourier transform infrared (FTIR) spectroscopy. FTIR experiments show that the PPMS structure is organized around a Si:H network with intact methyl groups. The correlation between deposition parameters and PPMS films properties is discussed." @default.
• W2004863912 created "2016-06-24" @default.
• W2004863912 creator A5036548951 @default.
• W2004863912 creator A5041594010 @default.
• W2004863912 creator A5066071663 @default.
• W2004863912 date "2000-09-01" @default.
• W2004863912 modified "2023-10-06" @default.
• W2004863912 title "Plasma polymerized methylsilane I: Characterization of thin photosensitive films for advanced lithography applications" @default.
• W2004863912 cites W1965475526 @default.
• W2004863912 cites W1970742329 @default.
• W2004863912 cites W1975683169 @default.
• W2004863912 cites W1987820481 @default.
• W2004863912 cites W1987981238 @default.
• W2004863912 cites W1995859029 @default.
• W2004863912 cites W1998847762 @default.
• W2004863912 cites W2005442885 @default.
• W2004863912 cites W2006725794 @default.
• W2004863912 cites W2010847252 @default.
• W2004863912 cites W2015249338 @default.
• W2004863912 cites W2018175406 @default.
• W2004863912 cites W2021852794 @default.
• W2004863912 cites W2040572926 @default.
• W2004863912 cites W2040902188 @default.
• W2004863912 cites W2041769641 @default.
• W2004863912 cites W2042903315 @default.
• W2004863912 cites W2043044595 @default.
• W2004863912 cites W2044608825 @default.
• W2004863912 cites W2044611955 @default.
• W2004863912 cites W2045070282 @default.
• W2004863912 cites W2045978528 @default.
• W2004863912 cites W2048877752 @default.
• W2004863912 cites W2051558626 @default.
• W2004863912 cites W2051618165 @default.
• W2004863912 cites W2060674278 @default.
• W2004863912 cites W2082351369 @default.
• W2004863912 cites W2084063143 @default.
• W2004863912 cites W2090789922 @default.
• W2004863912 cites W2108921478 @default.
• W2004863912 doi "https://doi.org/10.1116/1.1288943" @default.
• W2004863912 hasPublicationYear "2000" @default.
• W2004863912 type Work @default.
• W2004863912 sameAs 2004863912 @default.
• W2004863912 citedByCount "4" @default.
• W2004863912 crossrefType "journal-article" @default.
• W2004863912 hasAuthorship W2004863912A5036548951 @default.
• W2004863912 hasAuthorship W2004863912A5041594010 @default.
• W2004863912 hasAuthorship W2004863912A5066071663 @default.
• W2004863912 hasConcept C111368507 @default.
• W2004863912 hasConcept C113196181 @default.
• W2004863912 hasConcept C115545448 @default.
• W2004863912 hasConcept C127313418 @default.
• W2004863912 hasConcept C127413603 @default.
• W2004863912 hasConcept C151730666 @default.
• W2004863912 hasConcept C153642686 @default.
• W2004863912 hasConcept C159985019 @default.
• W2004863912 hasConcept C160892712 @default.
• W2004863912 hasConcept C171250308 @default.
• W2004863912 hasConcept C178790620 @default.
• W2004863912 hasConcept C18293161 @default.
• W2004863912 hasConcept C185592680 @default.
• W2004863912 hasConcept C19067145 @default.
• W2004863912 hasConcept C192562407 @default.
• W2004863912 hasConcept C204223013 @default.
• W2004863912 hasConcept C2777289219 @default.
• W2004863912 hasConcept C2780841128 @default.
• W2004863912 hasConcept C2816523 @default.
• W2004863912 hasConcept C42360764 @default.
• W2004863912 hasConcept C44228677 @default.
• W2004863912 hasConcept C49040817 @default.
• W2004863912 hasConcept C521977710 @default.
• W2004863912 hasConcept C64297162 @default.
• W2004863912 hasConcept C86803240 @default.
• W2004863912 hasConceptScore W2004863912C111368507 @default.
• W2004863912 hasConceptScore W2004863912C113196181 @default.
• W2004863912 hasConceptScore W2004863912C115545448 @default.
• W2004863912 hasConceptScore W2004863912C127313418 @default.
• W2004863912 hasConceptScore W2004863912C127413603 @default.
• W2004863912 hasConceptScore W2004863912C151730666 @default.
• W2004863912 hasConceptScore W2004863912C153642686 @default.
• W2004863912 hasConceptScore W2004863912C159985019 @default.
• W2004863912 hasConceptScore W2004863912C160892712 @default.
• W2004863912 hasConceptScore W2004863912C171250308 @default.
• W2004863912 hasConceptScore W2004863912C178790620 @default.
• W2004863912 hasConceptScore W2004863912C18293161 @default.
• W2004863912 hasConceptScore W2004863912C185592680 @default.
• W2004863912 hasConceptScore W2004863912C19067145 @default.
• W2004863912 hasConceptScore W2004863912C192562407 @default.
• W2004863912 hasConceptScore W2004863912C204223013 @default.
• W2004863912 hasConceptScore W2004863912C2777289219 @default.
• W2004863912 hasConceptScore W2004863912C2780841128 @default.
• W2004863912 hasConceptScore W2004863912C2816523 @default.
• W2004863912 hasConceptScore W2004863912C42360764 @default.
• W2004863912 hasConceptScore W2004863912C44228677 @default.
• W2004863912 hasConceptScore W2004863912C49040817 @default.
• W2004863912 hasConceptScore W2004863912C521977710 @default.
• W2004863912 hasConceptScore W2004863912C64297162 @default.
• W2004863912 hasConceptScore W2004863912C86803240 @default.
• W2004863912 hasIssue "5" @default.

• next