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- W2004865402 abstract "Micro/nanotribological and mechanical characterization of TiN film and single-crystal silicon was investigated. Hardness, friction, and wear properties of both materials were measured by a nanoindenter system. The results demonstrate the similarities and differences between both materials and show that TiN film has more preferable properties in hardness and wear resistance than those of single-crystal silicon. It is more likely that a methodology based on this study can be used for evaluating the quality of micro/nanofilms, and TiN film possesses desirable micro/nanotribological and mechanical characterization for MEMS applications." @default.
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- W2004865402 date "2004-04-01" @default.
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- W2004865402 title "Micro/Nanotribological and Mechanical Studies of TiN Thin-Film for MEMS Applications" @default.
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