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- W2004974928 abstract "The sensitivity of both qualitative and quantitative (grid-projection) Makyoh topography is analysed using analytic calculations. The essential difference between the two versions is pointed out. The sensitivity is defined on the analogy of the modulation transfer function and is expressed in terms of instrumental parameters and the detection limits of the imaging sensor in an analytic form. It is shown that the qualitative version is more sensitive than the quantitative one for surface features having small spatial wavelength. The effects of small-scale surface roughness and non-ideal collimation of the illumination is considered and it is shown that these effects decrease the sensitivity." @default.
- W2004974928 created "2016-06-24" @default.
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- W2004974928 date "2006-02-01" @default.
- W2004974928 modified "2023-10-16" @default.
- W2004974928 title "Sensitivity of Makyoh topography" @default.
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- W2004974928 doi "https://doi.org/10.1016/j.mssp.2006.01.063" @default.
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