Matches in SemOpenAlex for { <https://semopenalex.org/work/W2004976442> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2004976442 endingPage "933" @default.
- W2004976442 startingPage "929" @default.
- W2004976442 abstract "In this paper, we have preformed some simulations of reticle enhancement techniques (RET) for SLM-based maskless lithography. Our results show that, on the one hand, increased slope and larger process window can be simultaneously obtained by overtilting some mirrors around the printed structure; On the other hand, fully making use of the grayscaling generated by tilting a mirror across it, a maskless tool can use the same OPC model as a mask-based scanner, such as gray level serifs, sub-resolution scatter bars, transmittance controlled mask, and so on. The results also imply that optical maskless lithography (OML) provides the ability in attaining high resolution comparable to the mask-based lithography." @default.
- W2004976442 created "2016-06-24" @default.
- W2004976442 creator A5013201280 @default.
- W2004976442 creator A5016770575 @default.
- W2004976442 creator A5060710710 @default.
- W2004976442 creator A5064331025 @default.
- W2004976442 creator A5071344571 @default.
- W2004976442 date "2008-05-01" @default.
- W2004976442 modified "2023-09-23" @default.
- W2004976442 title "RET simulations for SLM-based maskless lithography" @default.
- W2004976442 cites W1972430378 @default.
- W2004976442 cites W1976055402 @default.
- W2004976442 cites W2021259484 @default.
- W2004976442 cites W2029995448 @default.
- W2004976442 cites W2054377555 @default.
- W2004976442 cites W2059622818 @default.
- W2004976442 cites W2060552955 @default.
- W2004976442 cites W2081936057 @default.
- W2004976442 cites W2088523252 @default.
- W2004976442 cites W2094050913 @default.
- W2004976442 cites W2098478003 @default.
- W2004976442 cites W1944115203 @default.
- W2004976442 cites W2003252017 @default.
- W2004976442 cites W2014219478 @default.
- W2004976442 doi "https://doi.org/10.1016/j.mee.2008.01.055" @default.
- W2004976442 hasPublicationYear "2008" @default.
- W2004976442 type Work @default.
- W2004976442 sameAs 2004976442 @default.
- W2004976442 citedByCount "3" @default.
- W2004976442 countsByYear W20049764422012 @default.
- W2004976442 countsByYear W20049764422013 @default.
- W2004976442 crossrefType "journal-article" @default.
- W2004976442 hasAuthorship W2004976442A5013201280 @default.
- W2004976442 hasAuthorship W2004976442A5016770575 @default.
- W2004976442 hasAuthorship W2004976442A5060710710 @default.
- W2004976442 hasAuthorship W2004976442A5064331025 @default.
- W2004976442 hasAuthorship W2004976442A5071344571 @default.
- W2004976442 hasConcept C120665830 @default.
- W2004976442 hasConcept C121332964 @default.
- W2004976442 hasConcept C137905882 @default.
- W2004976442 hasConcept C146617872 @default.
- W2004976442 hasConcept C160671074 @default.
- W2004976442 hasConcept C163581340 @default.
- W2004976442 hasConcept C171250308 @default.
- W2004976442 hasConcept C177409738 @default.
- W2004976442 hasConcept C182873914 @default.
- W2004976442 hasConcept C192562407 @default.
- W2004976442 hasConcept C200274948 @default.
- W2004976442 hasConcept C204223013 @default.
- W2004976442 hasConcept C2779227376 @default.
- W2004976442 hasConcept C2779751349 @default.
- W2004976442 hasConcept C49040817 @default.
- W2004976442 hasConcept C53524968 @default.
- W2004976442 hasConceptScore W2004976442C120665830 @default.
- W2004976442 hasConceptScore W2004976442C121332964 @default.
- W2004976442 hasConceptScore W2004976442C137905882 @default.
- W2004976442 hasConceptScore W2004976442C146617872 @default.
- W2004976442 hasConceptScore W2004976442C160671074 @default.
- W2004976442 hasConceptScore W2004976442C163581340 @default.
- W2004976442 hasConceptScore W2004976442C171250308 @default.
- W2004976442 hasConceptScore W2004976442C177409738 @default.
- W2004976442 hasConceptScore W2004976442C182873914 @default.
- W2004976442 hasConceptScore W2004976442C192562407 @default.
- W2004976442 hasConceptScore W2004976442C200274948 @default.
- W2004976442 hasConceptScore W2004976442C204223013 @default.
- W2004976442 hasConceptScore W2004976442C2779227376 @default.
- W2004976442 hasConceptScore W2004976442C2779751349 @default.
- W2004976442 hasConceptScore W2004976442C49040817 @default.
- W2004976442 hasConceptScore W2004976442C53524968 @default.
- W2004976442 hasIssue "5-6" @default.
- W2004976442 hasLocation W20049764421 @default.
- W2004976442 hasOpenAccess W2004976442 @default.
- W2004976442 hasPrimaryLocation W20049764421 @default.
- W2004976442 hasRelatedWork W1965756196 @default.
- W2004976442 hasRelatedWork W1981597245 @default.
- W2004976442 hasRelatedWork W2000620740 @default.
- W2004976442 hasRelatedWork W2002557126 @default.
- W2004976442 hasRelatedWork W2035734563 @default.
- W2004976442 hasRelatedWork W2039506060 @default.
- W2004976442 hasRelatedWork W2089259287 @default.
- W2004976442 hasRelatedWork W2152594935 @default.
- W2004976442 hasRelatedWork W2023112358 @default.
- W2004976442 hasRelatedWork W2753932977 @default.
- W2004976442 hasVolume "85" @default.
- W2004976442 isParatext "false" @default.
- W2004976442 isRetracted "false" @default.
- W2004976442 magId "2004976442" @default.
- W2004976442 workType "article" @default.