Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005064165> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2005064165 endingPage "2156" @default.
- W2005064165 startingPage "2153" @default.
- W2005064165 abstract "The authors have investigated the effect of in situ hydrogen plasmas generated by electron cyclotron resonance on growth rate and carbon incorporation in GaAs and AlGaAs grown by metalorganic molecular-beam epitaxy using triethylgallium and trimethylamine alane. Carbon backgrounds in GaAs grown at 500 °C were found to increase with increasing microwave power over the range 100–200 W and also with increasing H2 flow at 175 W. Hydrogen plasmas did not significantly increase the growth rate for either GaAs or AlGaAs even at growth temperatures as low as 375 °C. As at higher temperatures, carbon levels were not reduced in GaAs grown at low temperatures though some improvement was observed for AlGaAs grown at 375 °C. Plasmas were found to be much more effective for cleaning substrates prior to growth. At 500 °C, low microwave powers and moderate exposure times were found to produce the lowest levels of interfacial C, O, and Si contamination." @default.
- W2005064165 created "2016-06-24" @default.
- W2005064165 creator A5005386557 @default.
- W2005064165 creator A5017875762 @default.
- W2005064165 creator A5025661802 @default.
- W2005064165 creator A5077738125 @default.
- W2005064165 date "1992-09-01" @default.
- W2005064165 modified "2023-09-26" @default.
- W2005064165 title "Effect of electron cyclotron resonance generated hydrogen plasmas on carbon incorporation and interfacial quality of GaAs and AlGaAs grown by metalorganic molecular-beam epitaxy" @default.
- W2005064165 doi "https://doi.org/10.1116/1.586182" @default.
- W2005064165 hasPublicationYear "1992" @default.
- W2005064165 type Work @default.
- W2005064165 sameAs 2005064165 @default.
- W2005064165 citedByCount "9" @default.
- W2005064165 crossrefType "journal-article" @default.
- W2005064165 hasAuthorship W2005064165A5005386557 @default.
- W2005064165 hasAuthorship W2005064165A5017875762 @default.
- W2005064165 hasAuthorship W2005064165A5025661802 @default.
- W2005064165 hasAuthorship W2005064165A5077738125 @default.
- W2005064165 hasConcept C104779481 @default.
- W2005064165 hasConcept C110738630 @default.
- W2005064165 hasConcept C113196181 @default.
- W2005064165 hasConcept C121332964 @default.
- W2005064165 hasConcept C140205800 @default.
- W2005064165 hasConcept C145148216 @default.
- W2005064165 hasConcept C159985019 @default.
- W2005064165 hasConcept C171250308 @default.
- W2005064165 hasConcept C175361016 @default.
- W2005064165 hasConcept C175665537 @default.
- W2005064165 hasConcept C178790620 @default.
- W2005064165 hasConcept C185592680 @default.
- W2005064165 hasConcept C192562407 @default.
- W2005064165 hasConcept C2779227376 @default.
- W2005064165 hasConcept C2780464664 @default.
- W2005064165 hasConcept C3792809 @default.
- W2005064165 hasConcept C43617362 @default.
- W2005064165 hasConcept C44838205 @default.
- W2005064165 hasConcept C512968161 @default.
- W2005064165 hasConcept C62520636 @default.
- W2005064165 hasConcept C82706917 @default.
- W2005064165 hasConceptScore W2005064165C104779481 @default.
- W2005064165 hasConceptScore W2005064165C110738630 @default.
- W2005064165 hasConceptScore W2005064165C113196181 @default.
- W2005064165 hasConceptScore W2005064165C121332964 @default.
- W2005064165 hasConceptScore W2005064165C140205800 @default.
- W2005064165 hasConceptScore W2005064165C145148216 @default.
- W2005064165 hasConceptScore W2005064165C159985019 @default.
- W2005064165 hasConceptScore W2005064165C171250308 @default.
- W2005064165 hasConceptScore W2005064165C175361016 @default.
- W2005064165 hasConceptScore W2005064165C175665537 @default.
- W2005064165 hasConceptScore W2005064165C178790620 @default.
- W2005064165 hasConceptScore W2005064165C185592680 @default.
- W2005064165 hasConceptScore W2005064165C192562407 @default.
- W2005064165 hasConceptScore W2005064165C2779227376 @default.
- W2005064165 hasConceptScore W2005064165C2780464664 @default.
- W2005064165 hasConceptScore W2005064165C3792809 @default.
- W2005064165 hasConceptScore W2005064165C43617362 @default.
- W2005064165 hasConceptScore W2005064165C44838205 @default.
- W2005064165 hasConceptScore W2005064165C512968161 @default.
- W2005064165 hasConceptScore W2005064165C62520636 @default.
- W2005064165 hasConceptScore W2005064165C82706917 @default.
- W2005064165 hasIssue "5" @default.
- W2005064165 hasLocation W20050641651 @default.
- W2005064165 hasOpenAccess W2005064165 @default.
- W2005064165 hasPrimaryLocation W20050641651 @default.
- W2005064165 hasRelatedWork W1965138058 @default.
- W2005064165 hasRelatedWork W1971235368 @default.
- W2005064165 hasRelatedWork W1972999399 @default.
- W2005064165 hasRelatedWork W2021017841 @default.
- W2005064165 hasRelatedWork W2048614259 @default.
- W2005064165 hasRelatedWork W2080453485 @default.
- W2005064165 hasRelatedWork W2091765834 @default.
- W2005064165 hasRelatedWork W2116717085 @default.
- W2005064165 hasRelatedWork W4251828420 @default.
- W2005064165 hasRelatedWork W2040700392 @default.
- W2005064165 hasVolume "10" @default.
- W2005064165 isParatext "false" @default.
- W2005064165 isRetracted "false" @default.
- W2005064165 magId "2005064165" @default.
- W2005064165 workType "article" @default.