Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005094100> ?p ?o ?g. }
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- W2005094100 endingPage "175" @default.
- W2005094100 startingPage "172" @default.
- W2005094100 abstract "A new coating system was developed which consists fundamentally of plasma CVD (chemical vapor deposition) and ion-mixing. The system employs pulsed-gas introduction, pulsed-plasma generation and plasma base ion implantation (PBII). In this paper the formation of DLC films by the HPPC system is reported. The plasma densities were measured using a Langmuir probe and a 10-GHz microwave interferometer. DLC films were formed on the surface of workpieces using hydrocarbon gases by the HPPC system, with monitoring plasma density during the coating process. Raman spectra of DLC films by the HPPC system are similar in shape to those by ion-plating, and the fractions of amorphous and graphite components in Raman spectrum gained by segregated four peaks decreased with the decrease of CH4/C7H8 partial pressure ratios. The reason is considered that the larger the deposition rates of films become, the smaller the ion-mixing effects are. Furthermore, as the CH4/C7H8 ratio becomes as low as 1, this phenomenon becomes more apparent. For the further study, the plasma density as well as the change in gas pressure in the chamber must be monitored for the formation of uniform DLC films." @default.
- W2005094100 created "2016-06-24" @default.
- W2005094100 creator A5001762466 @default.
- W2005094100 creator A5004007841 @default.
- W2005094100 creator A5011217966 @default.
- W2005094100 creator A5038467940 @default.
- W2005094100 creator A5054979871 @default.
- W2005094100 creator A5056334062 @default.
- W2005094100 creator A5060442387 @default.
- W2005094100 creator A5074017720 @default.
- W2005094100 creator A5074057409 @default.
- W2005094100 creator A5088567145 @default.
- W2005094100 date "2001-02-01" @default.
- W2005094100 modified "2023-09-27" @default.
- W2005094100 title "DLC films formed by hybrid pulse plasma coating (HPPC) system" @default.
- W2005094100 cites W1748485138 @default.
- W2005094100 cites W1969355451 @default.
- W2005094100 cites W1979294628 @default.
- W2005094100 cites W2045252656 @default.
- W2005094100 cites W2082136510 @default.
- W2005094100 doi "https://doi.org/10.1016/s0257-8972(00)01051-3" @default.
- W2005094100 hasPublicationYear "2001" @default.
- W2005094100 type Work @default.
- W2005094100 sameAs 2005094100 @default.
- W2005094100 citedByCount "9" @default.
- W2005094100 countsByYear W20050941002012 @default.
- W2005094100 crossrefType "journal-article" @default.
- W2005094100 hasAuthorship W2005094100A5001762466 @default.
- W2005094100 hasAuthorship W2005094100A5004007841 @default.
- W2005094100 hasAuthorship W2005094100A5011217966 @default.
- W2005094100 hasAuthorship W2005094100A5038467940 @default.
- W2005094100 hasAuthorship W2005094100A5054979871 @default.
- W2005094100 hasAuthorship W2005094100A5056334062 @default.
- W2005094100 hasAuthorship W2005094100A5060442387 @default.
- W2005094100 hasAuthorship W2005094100A5074017720 @default.
- W2005094100 hasAuthorship W2005094100A5074057409 @default.
- W2005094100 hasAuthorship W2005094100A5088567145 @default.
- W2005094100 hasConcept C113196181 @default.
- W2005094100 hasConcept C120665830 @default.
- W2005094100 hasConcept C121332964 @default.
- W2005094100 hasConcept C145148216 @default.
- W2005094100 hasConcept C171250308 @default.
- W2005094100 hasConcept C176118016 @default.
- W2005094100 hasConcept C178790620 @default.
- W2005094100 hasConcept C185592680 @default.
- W2005094100 hasConcept C191897082 @default.
- W2005094100 hasConcept C192562407 @default.
- W2005094100 hasConcept C2779698641 @default.
- W2005094100 hasConcept C2781448156 @default.
- W2005094100 hasConcept C40003534 @default.
- W2005094100 hasConcept C41823505 @default.
- W2005094100 hasConcept C43503373 @default.
- W2005094100 hasConcept C43617362 @default.
- W2005094100 hasConcept C56052488 @default.
- W2005094100 hasConcept C57410435 @default.
- W2005094100 hasConcept C62520636 @default.
- W2005094100 hasConcept C8010536 @default.
- W2005094100 hasConcept C82706917 @default.
- W2005094100 hasConceptScore W2005094100C113196181 @default.
- W2005094100 hasConceptScore W2005094100C120665830 @default.
- W2005094100 hasConceptScore W2005094100C121332964 @default.
- W2005094100 hasConceptScore W2005094100C145148216 @default.
- W2005094100 hasConceptScore W2005094100C171250308 @default.
- W2005094100 hasConceptScore W2005094100C176118016 @default.
- W2005094100 hasConceptScore W2005094100C178790620 @default.
- W2005094100 hasConceptScore W2005094100C185592680 @default.
- W2005094100 hasConceptScore W2005094100C191897082 @default.
- W2005094100 hasConceptScore W2005094100C192562407 @default.
- W2005094100 hasConceptScore W2005094100C2779698641 @default.
- W2005094100 hasConceptScore W2005094100C2781448156 @default.
- W2005094100 hasConceptScore W2005094100C40003534 @default.
- W2005094100 hasConceptScore W2005094100C41823505 @default.
- W2005094100 hasConceptScore W2005094100C43503373 @default.
- W2005094100 hasConceptScore W2005094100C43617362 @default.
- W2005094100 hasConceptScore W2005094100C56052488 @default.
- W2005094100 hasConceptScore W2005094100C57410435 @default.
- W2005094100 hasConceptScore W2005094100C62520636 @default.
- W2005094100 hasConceptScore W2005094100C8010536 @default.
- W2005094100 hasConceptScore W2005094100C82706917 @default.
- W2005094100 hasIssue "1-3" @default.
- W2005094100 hasLocation W20050941001 @default.
- W2005094100 hasOpenAccess W2005094100 @default.
- W2005094100 hasPrimaryLocation W20050941001 @default.
- W2005094100 hasRelatedWork W1533359989 @default.
- W2005094100 hasRelatedWork W1966913416 @default.
- W2005094100 hasRelatedWork W1968225932 @default.
- W2005094100 hasRelatedWork W1979105838 @default.
- W2005094100 hasRelatedWork W2008336411 @default.
- W2005094100 hasRelatedWork W2081738052 @default.
- W2005094100 hasRelatedWork W2149039755 @default.
- W2005094100 hasRelatedWork W2313640041 @default.
- W2005094100 hasRelatedWork W2329099634 @default.
- W2005094100 hasRelatedWork W2509873670 @default.
- W2005094100 hasVolume "136" @default.
- W2005094100 isParatext "false" @default.
- W2005094100 isRetracted "false" @default.
- W2005094100 magId "2005094100" @default.
- W2005094100 workType "article" @default.