FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005099871> ?p ?o ?g. }

• W2005099871 endingPage "661" @default.
• W2005099871 startingPage "655" @default.
• W2005099871 abstract "The performance of surface channel MOSFET devices depends on the Si/SiO2 interface quality. The present study has examined the Si/SiO2 interface of strained Si n-channel MOSFETs fabricated on a Si/SiGe virtual substrate. Evidence of a variation in the oxidation rate of strained Si along the cross-hatch period is presented. The undulating oxide thickness was found to be accompanied by increased nanoscale roughness at the Si/SiO2 interface for the strained Si surface channel devices compared with conventional MOSFETs. Fluctuations in the strained Si surface channel thickness were additionally caused by the variation in oxidation rate. The control devices exhibited a tighter distribution of electrical characteristics than the strained Si devices due to the non-uniform cross-hatch severity across the Si/SiGe wafer. The results provide strong evidence that significantly enhanced performance of HNMOS surface channel devices is possible through optimization of epitaxial growth methods. Strain in the channel was maintained following device fabrication using a conventional process with a reduced thermal budget." @default.
• W2005099871 created "2016-06-24" @default.
• W2005099871 creator A5006392165 @default.
• W2005099871 creator A5015031715 @default.
• W2005099871 creator A5018156765 @default.
• W2005099871 creator A5033547546 @default.
• W2005099871 creator A5042360930 @default.
• W2005099871 creator A5042779260 @default.
• W2005099871 creator A5056425064 @default.
• W2005099871 creator A5061123980 @default.
• W2005099871 date "2002-06-17" @default.
• W2005099871 modified "2023-09-23" @default.
• W2005099871 title "Strained Si/SiGe n-channel MOSFETs: impact of cross-hatching on device performance" @default.
• W2005099871 cites W1508005014 @default.
• W2005099871 cites W1609866117 @default.
• W2005099871 cites W1644882913 @default.
• W2005099871 cites W1966450062 @default.
• W2005099871 cites W1966795017 @default.
• W2005099871 cites W1969950458 @default.
• W2005099871 cites W1969995533 @default.
• W2005099871 cites W1970110544 @default.
• W2005099871 cites W1973694208 @default.
• W2005099871 cites W1977047020 @default.
• W2005099871 cites W1978052988 @default.
• W2005099871 cites W1978979589 @default.
• W2005099871 cites W1981024873 @default.
• W2005099871 cites W1985438455 @default.
• W2005099871 cites W1988012911 @default.
• W2005099871 cites W1993248607 @default.
• W2005099871 cites W2004262976 @default.
• W2005099871 cites W2004806004 @default.
• W2005099871 cites W2011541950 @default.
• W2005099871 cites W2021684974 @default.
• W2005099871 cites W2027972875 @default.
• W2005099871 cites W2051202265 @default.
• W2005099871 cites W2054657383 @default.
• W2005099871 cites W2057875422 @default.
• W2005099871 cites W2064606745 @default.
• W2005099871 cites W2076615873 @default.
• W2005099871 cites W2082920361 @default.
• W2005099871 cites W2092841031 @default.
• W2005099871 cites W2094567683 @default.
• W2005099871 cites W2104370605 @default.
• W2005099871 cites W2136162399 @default.
• W2005099871 cites W2137900832 @default.
• W2005099871 cites W2138643547 @default.
• W2005099871 doi "https://doi.org/10.1088/0268-1242/17/7/303" @default.
• W2005099871 hasPublicationYear "2002" @default.
• W2005099871 type Work @default.
• W2005099871 sameAs 2005099871 @default.
• W2005099871 citedByCount "35" @default.
• W2005099871 countsByYear W20050998712012 @default.
• W2005099871 countsByYear W20050998712016 @default.
• W2005099871 countsByYear W20050998712023 @default.
• W2005099871 crossrefType "journal-article" @default.
• W2005099871 hasAuthorship W2005099871A5006392165 @default.
• W2005099871 hasAuthorship W2005099871A5015031715 @default.
• W2005099871 hasAuthorship W2005099871A5018156765 @default.
• W2005099871 hasAuthorship W2005099871A5033547546 @default.
• W2005099871 hasAuthorship W2005099871A5042360930 @default.
• W2005099871 hasAuthorship W2005099871A5042779260 @default.
• W2005099871 hasAuthorship W2005099871A5056425064 @default.
• W2005099871 hasAuthorship W2005099871A5061123980 @default.
• W2005099871 hasConcept C107365816 @default.
• W2005099871 hasConcept C110738630 @default.
• W2005099871 hasConcept C111368507 @default.
• W2005099871 hasConcept C119599485 @default.
• W2005099871 hasConcept C127162648 @default.
• W2005099871 hasConcept C127313418 @default.
• W2005099871 hasConcept C127413603 @default.
• W2005099871 hasConcept C136525101 @default.
• W2005099871 hasConcept C142724271 @default.
• W2005099871 hasConcept C159985019 @default.
• W2005099871 hasConcept C160671074 @default.
• W2005099871 hasConcept C165801399 @default.
• W2005099871 hasConcept C171250308 @default.
• W2005099871 hasConcept C172385210 @default.
• W2005099871 hasConcept C192562407 @default.
• W2005099871 hasConcept C204787440 @default.
• W2005099871 hasConcept C24326235 @default.
• W2005099871 hasConcept C2777289219 @default.
• W2005099871 hasConcept C2778413303 @default.
• W2005099871 hasConcept C2779227376 @default.
• W2005099871 hasConcept C49040817 @default.
• W2005099871 hasConcept C544956773 @default.
• W2005099871 hasConcept C71924100 @default.
• W2005099871 hasConceptScore W2005099871C107365816 @default.
• W2005099871 hasConceptScore W2005099871C110738630 @default.
• W2005099871 hasConceptScore W2005099871C111368507 @default.
• W2005099871 hasConceptScore W2005099871C119599485 @default.
• W2005099871 hasConceptScore W2005099871C127162648 @default.
• W2005099871 hasConceptScore W2005099871C127313418 @default.
• W2005099871 hasConceptScore W2005099871C127413603 @default.
• W2005099871 hasConceptScore W2005099871C136525101 @default.
• W2005099871 hasConceptScore W2005099871C142724271 @default.
• W2005099871 hasConceptScore W2005099871C159985019 @default.
• W2005099871 hasConceptScore W2005099871C160671074 @default.
• W2005099871 hasConceptScore W2005099871C165801399 @default.

• next