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- W2005127005 abstract "We have measured the scattering substance of calcium fluoride used for the excimer lithography grade materials by the new type of light scattering topography method. This method is thought to be effective for the observation method, which is no need of cutting samples. Some scattered particles have been observed in the matrix of calcium fluoride. The fog-like hazy calcium fluoride, which are occurred by annealing at high temperature, have been observed by the method. The small scattering substances, which coordinate along the structure of the crystal, and the large substances, which are disordered, form the particles. The small one is thought to be related to the structure of crystal of calcium fluoride. (© 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
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- W2005127005 date "2003-12-19" @default.
- W2005127005 modified "2023-09-27" @default.
- W2005127005 title "Light scattering topography of excimer grade CaF2 crystal" @default.
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- W2005127005 doi "https://doi.org/10.1002/pssc.200303928" @default.
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