FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005194808> ?p ?o ?g. }

• W2005194808 endingPage "2556" @default.
• W2005194808 startingPage "2543" @default.
• W2005194808 abstract "Radio-frequency sputtered SiO2 films can be made that contain a variety of optical absorption bands and electron spin resonance centers. In addition to absorption bands at 5.1, 5.8, and 7.6 eV that are typical of irradiated fused SiO2, two new absorption bands have been found. The G band at 5.4 eV and the H band at 6.55 eV are present in certain sputtered SiO2 films and develop further when they are annealed in forming gas or N2. The occurrence of these bands and the density of paramagnetic centers produced in SiO2 films when they are sputtered under different deposition conditions has been studied. The effect of annealing to 950°C in N2, O2, and forming gas on optical absorption bands and ESR centers has been determined. Absorption bands appear to be associated with oxygen deficiency in the sputtered SiO2 films since they will anneal completely at 930°C in oxygen. Hydrogen plays an important role in annealing of the B1 band at 5.1 eV, the E1′ band at 5.8 eV, and all the ESR centers. They anneal at 200°C lower temperatures in forming gas, compared to annealing in N2. The OH content, refractive index, Ar content, density, and etch rates of sputtered SiO2 films have also been measured. The properties of the film show the importance of plasma radiation and resputtering in determining film properties. Wide variations in optical absorption and ESR are observed in samples deposited under nominally identical conditions." @default.
• W2005194808 created "2016-06-24" @default.
• W2005194808 creator A5061271720 @default.
• W2005194808 date "1971-05-01" @default.
• W2005194808 modified "2023-10-18" @default.
• W2005194808 title "Production and Annealing of Color Centers in rf Sputtered SiO2 Films" @default.
• W2005194808 cites W162258076 @default.
• W2005194808 cites W1965044847 @default.
• W2005194808 cites W1966396062 @default.
• W2005194808 cites W1977774972 @default.
• W2005194808 cites W1990131744 @default.
• W2005194808 cites W2006449040 @default.
• W2005194808 cites W2017158164 @default.
• W2005194808 cites W2019147314 @default.
• W2005194808 cites W2020680792 @default.
• W2005194808 cites W2023501435 @default.
• W2005194808 cites W2035396550 @default.
• W2005194808 cites W2036922935 @default.
• W2005194808 cites W2037176092 @default.
• W2005194808 cites W2037511624 @default.
• W2005194808 cites W2042400613 @default.
• W2005194808 cites W2046033383 @default.
• W2005194808 cites W2056487308 @default.
• W2005194808 cites W2059709010 @default.
• W2005194808 cites W2064310220 @default.
• W2005194808 cites W2068512831 @default.
• W2005194808 cites W2071984008 @default.
• W2005194808 cites W2073158958 @default.
• W2005194808 cites W2077239494 @default.
• W2005194808 cites W2078096169 @default.
• W2005194808 cites W2082014353 @default.
• W2005194808 cites W2083973102 @default.
• W2005194808 cites W2089452552 @default.
• W2005194808 cites W2135590988 @default.
• W2005194808 cites W2168168221 @default.
• W2005194808 cites W2228454818 @default.
• W2005194808 cites W4235326677 @default.
• W2005194808 doi "https://doi.org/10.1063/1.1660577" @default.
• W2005194808 hasPublicationYear "1971" @default.
• W2005194808 type Work @default.
• W2005194808 sameAs 2005194808 @default.
• W2005194808 citedByCount "34" @default.
• W2005194808 crossrefType "journal-article" @default.
• W2005194808 hasAuthorship W2005194808A5061271720 @default.
• W2005194808 hasConcept C113196181 @default.
• W2005194808 hasConcept C119824511 @default.
• W2005194808 hasConcept C120665830 @default.
• W2005194808 hasConcept C121332964 @default.
• W2005194808 hasConcept C125287762 @default.
• W2005194808 hasConcept C159985019 @default.
• W2005194808 hasConcept C178790620 @default.
• W2005194808 hasConcept C181966813 @default.
• W2005194808 hasConcept C185592680 @default.
• W2005194808 hasConcept C187961010 @default.
• W2005194808 hasConcept C191274033 @default.
• W2005194808 hasConcept C191897082 @default.
• W2005194808 hasConcept C192562407 @default.
• W2005194808 hasConcept C2777855556 @default.
• W2005194808 hasConcept C42067758 @default.
• W2005194808 hasConcept C43617362 @default.
• W2005194808 hasConcept C46141821 @default.
• W2005194808 hasConcept C49040817 @default.
• W2005194808 hasConcept C540031477 @default.
• W2005194808 hasConceptScore W2005194808C113196181 @default.
• W2005194808 hasConceptScore W2005194808C119824511 @default.
• W2005194808 hasConceptScore W2005194808C120665830 @default.
• W2005194808 hasConceptScore W2005194808C121332964 @default.
• W2005194808 hasConceptScore W2005194808C125287762 @default.
• W2005194808 hasConceptScore W2005194808C159985019 @default.
• W2005194808 hasConceptScore W2005194808C178790620 @default.
• W2005194808 hasConceptScore W2005194808C181966813 @default.
• W2005194808 hasConceptScore W2005194808C185592680 @default.
• W2005194808 hasConceptScore W2005194808C187961010 @default.
• W2005194808 hasConceptScore W2005194808C191274033 @default.
• W2005194808 hasConceptScore W2005194808C191897082 @default.
• W2005194808 hasConceptScore W2005194808C192562407 @default.
• W2005194808 hasConceptScore W2005194808C2777855556 @default.
• W2005194808 hasConceptScore W2005194808C42067758 @default.
• W2005194808 hasConceptScore W2005194808C43617362 @default.
• W2005194808 hasConceptScore W2005194808C46141821 @default.
• W2005194808 hasConceptScore W2005194808C49040817 @default.
• W2005194808 hasConceptScore W2005194808C540031477 @default.
• W2005194808 hasIssue "6" @default.
• W2005194808 hasLocation W20051948081 @default.
• W2005194808 hasOpenAccess W2005194808 @default.
• W2005194808 hasPrimaryLocation W20051948081 @default.
• W2005194808 hasRelatedWork W1992595145 @default.
• W2005194808 hasRelatedWork W2017230003 @default.
• W2005194808 hasRelatedWork W2027777475 @default.
• W2005194808 hasRelatedWork W2241832213 @default.
• W2005194808 hasRelatedWork W2371588595 @default.
• W2005194808 hasRelatedWork W2376841360 @default.
• W2005194808 hasRelatedWork W2805380121 @default.
• W2005194808 hasRelatedWork W2925279542 @default.
• W2005194808 hasRelatedWork W3168849895 @default.
• W2005194808 hasRelatedWork W917333054 @default.
• W2005194808 hasVolume "42" @default.
• W2005194808 isParatext "false" @default.

• next