FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005209164> ?p ?o ?g. }

• W2005209164 endingPage "796" @default.
• W2005209164 startingPage "792" @default.
• W2005209164 abstract "Germanium-doped silicon oxide thin films were deposited at low temperature by using an improved helicon plasma assisted reactive evaporation technique. The origins of hydrogen contamination in the film were investigated, and were found to be H incorporation during deposition and postdeposition water absorption. The H incorporation during deposition was avoided by using an effective method to eliminate the residual hydrogen present in the deposition system. The microstructure, chemical bonds, chemical etch rate, and optical index of the films were studied as a function of the deposition conditions. Granular microstructures were observed in low-density films, and were found to be the cause of postdeposition water absorption. The granular microstructure was eliminated and the film was densified by increasing the helicon plasma power and substrate bias during deposition. A high-density film was shown to have no postdeposition water absorption and no OH detected by using a Fourier-transform infrared spectrometer." @default.
• W2005209164 created "2016-06-24" @default.
• W2005209164 creator A5002543813 @default.
• W2005209164 creator A5013611413 @default.
• W2005209164 creator A5040194314 @default.
• W2005209164 creator A5055433353 @default.
• W2005209164 creator A5061187021 @default.
• W2005209164 creator A5073249367 @default.
• W2005209164 date "2003-04-25" @default.
• W2005209164 modified "2023-10-14" @default.
• W2005209164 title "Hydrogen contamination in Ge-doped SiO2 thin films prepared by helicon activated reactive evaporation" @default.
• W2005209164 cites W1668585841 @default.
• W2005209164 cites W1955078119 @default.
• W2005209164 cites W1995066656 @default.
• W2005209164 cites W1998253289 @default.
• W2005209164 cites W1999956381 @default.
• W2005209164 cites W2003134503 @default.
• W2005209164 cites W2018572451 @default.
• W2005209164 cites W2033900509 @default.
• W2005209164 cites W2034028123 @default.
• W2005209164 cites W2049959962 @default.
• W2005209164 cites W2050306273 @default.
• W2005209164 cites W2053859851 @default.
• W2005209164 cites W2061051689 @default.
• W2005209164 cites W2081074264 @default.
• W2005209164 cites W2091138781 @default.
• W2005209164 cites W2135590988 @default.
• W2005209164 cites W2147783858 @default.
• W2005209164 doi "https://doi.org/10.1116/1.1570842" @default.
• W2005209164 hasPublicationYear "2003" @default.
• W2005209164 type Work @default.
• W2005209164 sameAs 2005209164 @default.
• W2005209164 citedByCount "5" @default.
• W2005209164 crossrefType "journal-article" @default.
• W2005209164 hasAuthorship W2005209164A5002543813 @default.
• W2005209164 hasAuthorship W2005209164A5013611413 @default.
• W2005209164 hasAuthorship W2005209164A5040194314 @default.
• W2005209164 hasAuthorship W2005209164A5055433353 @default.
• W2005209164 hasAuthorship W2005209164A5061187021 @default.
• W2005209164 hasAuthorship W2005209164A5073249367 @default.
• W2005209164 hasBestOaLocation W20052091642 @default.
• W2005209164 hasConcept C113196181 @default.
• W2005209164 hasConcept C121332964 @default.
• W2005209164 hasConcept C127413603 @default.
• W2005209164 hasConcept C151730666 @default.
• W2005209164 hasConcept C159985019 @default.
• W2005209164 hasConcept C160892712 @default.
• W2005209164 hasConcept C171250308 @default.
• W2005209164 hasConcept C185592680 @default.
• W2005209164 hasConcept C19067145 @default.
• W2005209164 hasConcept C191897082 @default.
• W2005209164 hasConcept C192562407 @default.
• W2005209164 hasConcept C2779123320 @default.
• W2005209164 hasConcept C2816523 @default.
• W2005209164 hasConcept C42360764 @default.
• W2005209164 hasConcept C43617362 @default.
• W2005209164 hasConcept C49040817 @default.
• W2005209164 hasConcept C544956773 @default.
• W2005209164 hasConcept C57863236 @default.
• W2005209164 hasConcept C61441594 @default.
• W2005209164 hasConcept C62520636 @default.
• W2005209164 hasConcept C64297162 @default.
• W2005209164 hasConcept C82706917 @default.
• W2005209164 hasConcept C86803240 @default.
• W2005209164 hasConcept C87976508 @default.
• W2005209164 hasConcept C97355855 @default.
• W2005209164 hasConceptScore W2005209164C113196181 @default.
• W2005209164 hasConceptScore W2005209164C121332964 @default.
• W2005209164 hasConceptScore W2005209164C127413603 @default.
• W2005209164 hasConceptScore W2005209164C151730666 @default.
• W2005209164 hasConceptScore W2005209164C159985019 @default.
• W2005209164 hasConceptScore W2005209164C160892712 @default.
• W2005209164 hasConceptScore W2005209164C171250308 @default.
• W2005209164 hasConceptScore W2005209164C185592680 @default.
• W2005209164 hasConceptScore W2005209164C19067145 @default.
• W2005209164 hasConceptScore W2005209164C191897082 @default.
• W2005209164 hasConceptScore W2005209164C192562407 @default.
• W2005209164 hasConceptScore W2005209164C2779123320 @default.
• W2005209164 hasConceptScore W2005209164C2816523 @default.
• W2005209164 hasConceptScore W2005209164C42360764 @default.
• W2005209164 hasConceptScore W2005209164C43617362 @default.
• W2005209164 hasConceptScore W2005209164C49040817 @default.
• W2005209164 hasConceptScore W2005209164C544956773 @default.
• W2005209164 hasConceptScore W2005209164C57863236 @default.
• W2005209164 hasConceptScore W2005209164C61441594 @default.
• W2005209164 hasConceptScore W2005209164C62520636 @default.
• W2005209164 hasConceptScore W2005209164C64297162 @default.
• W2005209164 hasConceptScore W2005209164C82706917 @default.
• W2005209164 hasConceptScore W2005209164C86803240 @default.
• W2005209164 hasConceptScore W2005209164C87976508 @default.
• W2005209164 hasConceptScore W2005209164C97355855 @default.
• W2005209164 hasIssue "3" @default.
• W2005209164 hasLocation W20052091641 @default.
• W2005209164 hasLocation W20052091642 @default.
• W2005209164 hasOpenAccess W2005209164 @default.
• W2005209164 hasPrimaryLocation W20052091641 @default.
• W2005209164 hasRelatedWork W155467560 @default.
• W2005209164 hasRelatedWork W1893653219 @default.

• next