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- W2005220295 abstract "We have used a kinoform to increase the beam-power utilization in an excimer-laser-machining experiment. The kinoform creates the pattern to be machined. Thus less power is wasted on the blocking parts of a shadow mask. To achieve as smooth an intensity profile as possible, the kinoform was also used together with a microlens-array beam homogenizer. We discuss the intensity distributions of the patterns created by the kinoform with and without the beam homogenizer as well as the design of the kinoform and the homogenizer, with emphasis on the relation to the coherence properties of the laser beam." @default.
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- W2005220295 date "1995-11-20" @default.
- W2005220295 modified "2023-10-06" @default.
- W2005220295 title "Laser-machining experiment with an excimer laser and a kinoform." @default.
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- W2005220295 doi "https://doi.org/10.1364/ao.34.007718" @default.
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