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- W2005265338 endingPage "953" @default.
- W2005265338 startingPage "951" @default.
- W2005265338 abstract "Si/SixGe1−x multilayers were implanted with Si ions of 540 keV at doses between 1.0×1014 and 2.5×1015 ions/cm2. Channeling spectra were taken using 3 MeV B++ ions. These measurements showed a rapid increase of the Ge minimum yield with implantation dose. The increases were paralleled by a growth of disorder peaks in those parts of the Si backscattering spectrum corresponding to the SixGe1−x layers. After 1.2×1015 Si ions/cm2 the SiGe layers were completely amorphized. Cross-sectional transmission electron microscope pictures confirmed the selective amorphization of the SiGe layers. Annealing of an irradiated sample resulted in recrystallization of all the amorphous layers in the 450–550 °C temperature range." @default.
- W2005265338 created "2016-06-24" @default.
- W2005265338 creator A5010794889 @default.
- W2005265338 creator A5018515346 @default.
- W2005265338 creator A5032349265 @default.
- W2005265338 creator A5042774555 @default.
- W2005265338 creator A5064867908 @default.
- W2005265338 creator A5085898832 @default.
- W2005265338 date "1991-03-04" @default.
- W2005265338 modified "2023-09-27" @default.
- W2005265338 title "Selective amorphization of ion-bombarded SiGe strained-layer superlattices" @default.
- W2005265338 cites W2065404411 @default.
- W2005265338 cites W2085319177 @default.
- W2005265338 cites W2085582669 @default.
- W2005265338 doi "https://doi.org/10.1063/1.104488" @default.
- W2005265338 hasPublicationYear "1991" @default.
- W2005265338 type Work @default.
- W2005265338 sameAs 2005265338 @default.
- W2005265338 citedByCount "37" @default.
- W2005265338 countsByYear W20052653382012 @default.
- W2005265338 countsByYear W20052653382013 @default.
- W2005265338 countsByYear W20052653382015 @default.
- W2005265338 countsByYear W20052653382016 @default.
- W2005265338 countsByYear W20052653382022 @default.
- W2005265338 crossrefType "journal-article" @default.
- W2005265338 hasAuthorship W2005265338A5010794889 @default.
- W2005265338 hasAuthorship W2005265338A5018515346 @default.
- W2005265338 hasAuthorship W2005265338A5032349265 @default.
- W2005265338 hasAuthorship W2005265338A5042774555 @default.
- W2005265338 hasAuthorship W2005265338A5064867908 @default.
- W2005265338 hasAuthorship W2005265338A5085898832 @default.
- W2005265338 hasConcept C105382558 @default.
- W2005265338 hasConcept C111337013 @default.
- W2005265338 hasConcept C113196181 @default.
- W2005265338 hasConcept C121332964 @default.
- W2005265338 hasConcept C1276947 @default.
- W2005265338 hasConcept C145148216 @default.
- W2005265338 hasConcept C146088050 @default.
- W2005265338 hasConcept C151730666 @default.
- W2005265338 hasConcept C171250308 @default.
- W2005265338 hasConcept C178790620 @default.
- W2005265338 hasConcept C185544564 @default.
- W2005265338 hasConcept C185592680 @default.
- W2005265338 hasConcept C191897082 @default.
- W2005265338 hasConcept C192562407 @default.
- W2005265338 hasConcept C195702682 @default.
- W2005265338 hasConcept C2777855556 @default.
- W2005265338 hasConcept C41823505 @default.
- W2005265338 hasConcept C43617362 @default.
- W2005265338 hasConcept C4839761 @default.
- W2005265338 hasConcept C49040817 @default.
- W2005265338 hasConcept C56052488 @default.
- W2005265338 hasConcept C8010536 @default.
- W2005265338 hasConcept C86803240 @default.
- W2005265338 hasConceptScore W2005265338C105382558 @default.
- W2005265338 hasConceptScore W2005265338C111337013 @default.
- W2005265338 hasConceptScore W2005265338C113196181 @default.
- W2005265338 hasConceptScore W2005265338C121332964 @default.
- W2005265338 hasConceptScore W2005265338C1276947 @default.
- W2005265338 hasConceptScore W2005265338C145148216 @default.
- W2005265338 hasConceptScore W2005265338C146088050 @default.
- W2005265338 hasConceptScore W2005265338C151730666 @default.
- W2005265338 hasConceptScore W2005265338C171250308 @default.
- W2005265338 hasConceptScore W2005265338C178790620 @default.
- W2005265338 hasConceptScore W2005265338C185544564 @default.
- W2005265338 hasConceptScore W2005265338C185592680 @default.
- W2005265338 hasConceptScore W2005265338C191897082 @default.
- W2005265338 hasConceptScore W2005265338C192562407 @default.
- W2005265338 hasConceptScore W2005265338C195702682 @default.
- W2005265338 hasConceptScore W2005265338C2777855556 @default.
- W2005265338 hasConceptScore W2005265338C41823505 @default.
- W2005265338 hasConceptScore W2005265338C43617362 @default.
- W2005265338 hasConceptScore W2005265338C4839761 @default.
- W2005265338 hasConceptScore W2005265338C49040817 @default.
- W2005265338 hasConceptScore W2005265338C56052488 @default.
- W2005265338 hasConceptScore W2005265338C8010536 @default.
- W2005265338 hasConceptScore W2005265338C86803240 @default.
- W2005265338 hasIssue "9" @default.
- W2005265338 hasLocation W20052653381 @default.
- W2005265338 hasOpenAccess W2005265338 @default.
- W2005265338 hasPrimaryLocation W20052653381 @default.
- W2005265338 hasRelatedWork W2000143059 @default.
- W2005265338 hasRelatedWork W2005181459 @default.
- W2005265338 hasRelatedWork W2011898829 @default.
- W2005265338 hasRelatedWork W2067847322 @default.
- W2005265338 hasRelatedWork W2087453303 @default.
- W2005265338 hasRelatedWork W2088839577 @default.
- W2005265338 hasRelatedWork W2090448799 @default.
- W2005265338 hasRelatedWork W2094481310 @default.
- W2005265338 hasRelatedWork W2096011054 @default.
- W2005265338 hasRelatedWork W2140666605 @default.
- W2005265338 hasVolume "58" @default.
- W2005265338 isParatext "false" @default.
- W2005265338 isRetracted "false" @default.
- W2005265338 magId "2005265338" @default.
- W2005265338 workType "article" @default.