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• W2005274324 endingPage "15114" @default.
• W2005274324 startingPage "15114" @default.
• W2005274324 abstract "In the present study we report a new multilayer combination comprised of refracting layers of niobium carbide and spacer layers of silicon as a more stable and high reflecting combination for the 10 - 20 nm wavelength region. The reflectivity of the new combination is comparable to Mo/Si conventional mirrors. Annealing experiments carried out with NbC/Si multilayer at 600°C temperature showed a ~2.5% drop in the soft x-ray reflectivity along with a marginal contraction in the multilayer period length. The multilayer structure is found stable after the heat treatment. Crystallization of the niobium carbide and silicon layers is responsible for the compaction in the period length as revealed by the grazing incidence x-ray diffraction measurements. No signature of silicide formation or any other chemical species could be detected. The multilayer structures were grown by ion beam sputtering technique using a compound target of niobium carbide. Soft x-ray reflectivity measurements performed at the Indus-1 and BESSY-II synchrotron radiation sources are found in good agreement with the simulations." @default.
• W2005274324 created "2016-06-24" @default.
• W2005274324 creator A5007291530 @default.
• W2005274324 creator A5017787398 @default.
• W2005274324 creator A5046428990 @default.
• W2005274324 creator A5071528605 @default.
• W2005274324 creator A5091322562 @default.
• W2005274324 date "2012-06-20" @default.
• W2005274324 modified "2023-09-23" @default.
• W2005274324 title "NbC/Si multilayer mirror for next generation EUV light sources" @default.
• W2005274324 cites W1984370260 @default.
• W2005274324 cites W1987683430 @default.
• W2005274324 cites W1990041407 @default.
• W2005274324 cites W2021407985 @default.
• W2005274324 cites W2024079040 @default.
• W2005274324 cites W2044834151 @default.
• W2005274324 cites W2085224209 @default.
• W2005274324 cites W2086529087 @default.
• W2005274324 cites W2087599743 @default.
• W2005274324 cites W2110462903 @default.
• W2005274324 cites W2114327698 @default.
• W2005274324 cites W2124912033 @default.
• W2005274324 cites W2134091425 @default.
• W2005274324 cites W2151853420 @default.
• W2005274324 cites W4205466340 @default.
• W2005274324 doi "https://doi.org/10.1364/oe.20.015114" @default.
• W2005274324 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22772209" @default.
• W2005274324 hasPublicationYear "2012" @default.
• W2005274324 type Work @default.
• W2005274324 sameAs 2005274324 @default.
• W2005274324 citedByCount "17" @default.
• W2005274324 countsByYear W20052743242013 @default.
• W2005274324 countsByYear W20052743242014 @default.
• W2005274324 countsByYear W20052743242015 @default.
• W2005274324 countsByYear W20052743242016 @default.
• W2005274324 countsByYear W20052743242018 @default.
• W2005274324 countsByYear W20052743242019 @default.
• W2005274324 countsByYear W20052743242021 @default.
• W2005274324 countsByYear W20052743242022 @default.
• W2005274324 countsByYear W20052743242023 @default.
• W2005274324 crossrefType "journal-article" @default.
• W2005274324 hasAuthorship W2005274324A5007291530 @default.
• W2005274324 hasAuthorship W2005274324A5017787398 @default.
• W2005274324 hasAuthorship W2005274324A5046428990 @default.
• W2005274324 hasAuthorship W2005274324A5071528605 @default.
• W2005274324 hasAuthorship W2005274324A5091322562 @default.
• W2005274324 hasBestOaLocation W20052743241 @default.
• W2005274324 hasConcept C120665830 @default.
• W2005274324 hasConcept C121332964 @default.
• W2005274324 hasConcept C159985019 @default.
• W2005274324 hasConcept C16332341 @default.
• W2005274324 hasConcept C171250308 @default.
• W2005274324 hasConcept C19067145 @default.
• W2005274324 hasConcept C191897082 @default.
• W2005274324 hasConcept C192562407 @default.
• W2005274324 hasConcept C207114421 @default.
• W2005274324 hasConcept C22423302 @default.
• W2005274324 hasConcept C2777587929 @default.
• W2005274324 hasConcept C2777855556 @default.
• W2005274324 hasConcept C2780722187 @default.
• W2005274324 hasConcept C2780901251 @default.
• W2005274324 hasConcept C49040817 @default.
• W2005274324 hasConcept C507968137 @default.
• W2005274324 hasConcept C544956773 @default.
• W2005274324 hasConceptScore W2005274324C120665830 @default.
• W2005274324 hasConceptScore W2005274324C121332964 @default.
• W2005274324 hasConceptScore W2005274324C159985019 @default.
• W2005274324 hasConceptScore W2005274324C16332341 @default.
• W2005274324 hasConceptScore W2005274324C171250308 @default.
• W2005274324 hasConceptScore W2005274324C19067145 @default.
• W2005274324 hasConceptScore W2005274324C191897082 @default.
• W2005274324 hasConceptScore W2005274324C192562407 @default.
• W2005274324 hasConceptScore W2005274324C207114421 @default.
• W2005274324 hasConceptScore W2005274324C22423302 @default.
• W2005274324 hasConceptScore W2005274324C2777587929 @default.
• W2005274324 hasConceptScore W2005274324C2777855556 @default.
• W2005274324 hasConceptScore W2005274324C2780722187 @default.
• W2005274324 hasConceptScore W2005274324C2780901251 @default.
• W2005274324 hasConceptScore W2005274324C49040817 @default.
• W2005274324 hasConceptScore W2005274324C507968137 @default.
• W2005274324 hasConceptScore W2005274324C544956773 @default.
• W2005274324 hasIssue "14" @default.
• W2005274324 hasLocation W20052743241 @default.
• W2005274324 hasLocation W20052743242 @default.
• W2005274324 hasOpenAccess W2005274324 @default.
• W2005274324 hasPrimaryLocation W20052743241 @default.
• W2005274324 hasRelatedWork W1504441993 @default.
• W2005274324 hasRelatedWork W1996579858 @default.
• W2005274324 hasRelatedWork W2009409521 @default.
• W2005274324 hasRelatedWork W2027797286 @default.
• W2005274324 hasRelatedWork W2028247303 @default.
• W2005274324 hasRelatedWork W2084327918 @default.
• W2005274324 hasRelatedWork W2506768221 @default.
• W2005274324 hasRelatedWork W3117851161 @default.
• W2005274324 hasRelatedWork W4210389720 @default.
• W2005274324 hasRelatedWork W4297168783 @default.
• W2005274324 hasVolume "20" @default.
• W2005274324 isParatext "false" @default.

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