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- W2005297070 abstract "Results of a recent program undertaken at Bell Laboratories on silicide gate technology are reviewed with particular reference to the TaSi2/n+ poly-Si structure. This high-conductivity refractory gate structure greatly alleviates the layout and routing problems due to large RC time constants of fine-line poly-Si interconnects. This review contains a discussion of the metallurgical effects, associated with sintering metal and metal–silicon alloy films on polycrystalline silicon, oxidation behavior of silicides, their MOS (process) compatibility, the generic reliability, and trade-offs involved in the selection of a silicide from the group TiSi2, TaSi2, MoSi2 and WSi2." @default.
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- W2005297070 date "1981-09-01" @default.
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- W2005297070 title "Refractory metal silicides for VLSI applications" @default.
- W2005297070 doi "https://doi.org/10.1116/1.571148" @default.
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