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- W2005309035 abstract "Nanoprecision plunge cutting tests were carried out on single-crystal silicon (0 0 1) samples along various directions at different tool rake angles, and subsurface damage was characterized by cross-sectional transmission electron microscopy and laser micro-Raman spectroscopy. It was found that amorphization, poly-crystallization, dislocation and internal microcracking occurred and these material responses depended strongly on the cutting direction. When cutting in the [11¯0] and [01¯0] directions, deep line defects consisting of microcracks and dislocation groups occurred even when the surface was “ductile”-cut; while for the [128309¯0] direction, the damage depth was reduced by a factor of five." @default.
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- W2005309035 date "2012-01-01" @default.
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- W2005309035 title "Crystallographic effect on subsurface damage formation in silicon microcutting" @default.
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- W2005309035 doi "https://doi.org/10.1016/j.cirp.2012.03.070" @default.
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