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• W2005367730 endingPage "195" @default.
• W2005367730 startingPage "190" @default.
• W2005367730 abstract "A low cost, high reliability accelerometer microsystem designed for crash sensing in automotive airbag electronic control units is presented. The proposed microsystem offers high level output, on-line self-test function, small size (3.5 mm × 3.5 mm × 1.15 mm), and high design flexibility thanks to a two-chip construction. The sensitive part is a surface micromachined capacitive interdigitated structure realized from a SIMOX SOI substrate. The accelerometer operates in a closed loop mode using electrostatic feedback with conditioning circuitry realized in a 2 μm CMOS process. A high performance readout circuit using switched capacitors has been developed. Behavioural simulation results show a bandwidth of 630 Hz at ±50g with 5 V power supply. The fabrication process includes the realization of a free-standing seismic mass by means of reactive ion etching and sacrificial oxide etching, the mechanical protection of the sensing element with a thin silicon cap bonded onto the structured SOI wafer, and eventually the electrical connection with the ASIC by flip-chip bonding. Preliminary results are very encouraging: dynamic actuation of the sensing elements is optically tested, with a yield of 70% at a prototype level. Excellent shock resistance and low internal stress are observed." @default.
• W2005367730 created "2016-06-24" @default.
• W2005367730 creator A5006735909 @default.
• W2005367730 creator A5019637024 @default.
• W2005367730 creator A5030201688 @default.
• W2005367730 creator A5031909430 @default.
• W2005367730 creator A5035142691 @default.
• W2005367730 creator A5037375042 @default.
• W2005367730 creator A5056168704 @default.
• W2005367730 creator A5060691326 @default.
• W2005367730 creator A5063488717 @default.
• W2005367730 date "1995-01-01" @default.
• W2005367730 modified "2023-10-01" @default.
• W2005367730 title "Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability" @default.
• W2005367730 cites W1987780641 @default.
• W2005367730 cites W1991765443 @default.
• W2005367730 cites W2031193284 @default.
• W2005367730 cites W2084171456 @default.
• W2005367730 cites W2092119034 @default.
• W2005367730 cites W2139976966 @default.
• W2005367730 cites W4242980751 @default.
• W2005367730 doi "https://doi.org/10.1016/0924-4247(94)00888-o" @default.
• W2005367730 hasPublicationYear "1995" @default.
• W2005367730 type Work @default.
• W2005367730 sameAs 2005367730 @default.
• W2005367730 citedByCount "130" @default.
• W2005367730 countsByYear W20053677302012 @default.
• W2005367730 countsByYear W20053677302013 @default.
• W2005367730 countsByYear W20053677302014 @default.
• W2005367730 countsByYear W20053677302015 @default.
• W2005367730 countsByYear W20053677302016 @default.
• W2005367730 countsByYear W20053677302017 @default.
• W2005367730 countsByYear W20053677302018 @default.
• W2005367730 countsByYear W20053677302019 @default.
• W2005367730 countsByYear W20053677302020 @default.
• W2005367730 countsByYear W20053677302021 @default.
• W2005367730 countsByYear W20053677302022 @default.
• W2005367730 crossrefType "journal-article" @default.
• W2005367730 hasAuthorship W2005367730A5006735909 @default.
• W2005367730 hasAuthorship W2005367730A5019637024 @default.
• W2005367730 hasAuthorship W2005367730A5030201688 @default.
• W2005367730 hasAuthorship W2005367730A5031909430 @default.
• W2005367730 hasAuthorship W2005367730A5035142691 @default.
• W2005367730 hasAuthorship W2005367730A5037375042 @default.
• W2005367730 hasAuthorship W2005367730A5056168704 @default.
• W2005367730 hasAuthorship W2005367730A5060691326 @default.
• W2005367730 hasAuthorship W2005367730A5063488717 @default.
• W2005367730 hasConcept C111919701 @default.
• W2005367730 hasConcept C119599485 @default.
• W2005367730 hasConcept C127413603 @default.
• W2005367730 hasConcept C151054161 @default.
• W2005367730 hasConcept C160671074 @default.
• W2005367730 hasConcept C165801399 @default.
• W2005367730 hasConcept C171250308 @default.
• W2005367730 hasConcept C192562407 @default.
• W2005367730 hasConcept C206755178 @default.
• W2005367730 hasConcept C24326235 @default.
• W2005367730 hasConcept C2780330379 @default.
• W2005367730 hasConcept C37977207 @default.
• W2005367730 hasConcept C41008148 @default.
• W2005367730 hasConcept C46362747 @default.
• W2005367730 hasConcept C49040817 @default.
• W2005367730 hasConcept C52192207 @default.
• W2005367730 hasConcept C53143962 @default.
• W2005367730 hasConcept C544956773 @default.
• W2005367730 hasConcept C89805583 @default.
• W2005367730 hasConceptScore W2005367730C111919701 @default.
• W2005367730 hasConceptScore W2005367730C119599485 @default.
• W2005367730 hasConceptScore W2005367730C127413603 @default.
• W2005367730 hasConceptScore W2005367730C151054161 @default.
• W2005367730 hasConceptScore W2005367730C160671074 @default.
• W2005367730 hasConceptScore W2005367730C165801399 @default.
• W2005367730 hasConceptScore W2005367730C171250308 @default.
• W2005367730 hasConceptScore W2005367730C192562407 @default.
• W2005367730 hasConceptScore W2005367730C206755178 @default.
• W2005367730 hasConceptScore W2005367730C24326235 @default.
• W2005367730 hasConceptScore W2005367730C2780330379 @default.
• W2005367730 hasConceptScore W2005367730C37977207 @default.
• W2005367730 hasConceptScore W2005367730C41008148 @default.
• W2005367730 hasConceptScore W2005367730C46362747 @default.
• W2005367730 hasConceptScore W2005367730C49040817 @default.
• W2005367730 hasConceptScore W2005367730C52192207 @default.
• W2005367730 hasConceptScore W2005367730C53143962 @default.
• W2005367730 hasConceptScore W2005367730C544956773 @default.
• W2005367730 hasConceptScore W2005367730C89805583 @default.
• W2005367730 hasIssue "1-3" @default.
• W2005367730 hasLocation W20053677301 @default.
• W2005367730 hasOpenAccess W2005367730 @default.
• W2005367730 hasPrimaryLocation W20053677301 @default.
• W2005367730 hasRelatedWork W1844707803 @default.
• W2005367730 hasRelatedWork W1991177310 @default.
• W2005367730 hasRelatedWork W2005185715 @default.
• W2005367730 hasRelatedWork W2066441478 @default.
• W2005367730 hasRelatedWork W2124765581 @default.
• W2005367730 hasRelatedWork W2134940111 @default.
• W2005367730 hasRelatedWork W2243094698 @default.
• W2005367730 hasRelatedWork W2740701609 @default.
• W2005367730 hasRelatedWork W2911329264 @default.

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