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- W2005374257 abstract "Abstract Boron ions were implanted into high resistivity Si wafers at energies in the 15–50 MeV range and doses in the 1011-1016 cm−2 range. The distribution of the implanted ions was analyzed by spreading resistance profilometry and for the high fluences by secondary ion mass spectrometry. Some samples were implanted with the beam normal to the wafer surface to study the channeling effect in a pure electronic stopping power regime of slowing down. The experimental measurements of the projected ranges and of the stragglings are compared with calculations based on the usual LSS and Bethe-Bloch formulas for the stopping power. This classic approach justifies quantitatively the distribution for the samples implanted in a random direction. The I-V characteristic of a diode performed by multiple energy boron implants of 15, 22 and 50 MeV is presented. The obtained breakdown voltage, 5 × 103 V, represents a possible application of the high energy implants." @default.
- W2005374257 created "2016-06-24" @default.
- W2005374257 creator A5013224471 @default.
- W2005374257 creator A5020390079 @default.
- W2005374257 creator A5040585430 @default.
- W2005374257 creator A5065475514 @default.
- W2005374257 creator A5071565486 @default.
- W2005374257 creator A5079752209 @default.
- W2005374257 date "1991-04-01" @default.
- W2005374257 modified "2023-09-29" @default.
- W2005374257 title "Measurements and applications of high energy boron implants in silicon" @default.
- W2005374257 cites W1977481714 @default.
- W2005374257 cites W2000523942 @default.
- W2005374257 cites W2005045165 @default.
- W2005374257 cites W2006863634 @default.
- W2005374257 cites W2026047090 @default.
- W2005374257 cites W2029599676 @default.
- W2005374257 cites W2048059185 @default.
- W2005374257 cites W2896684237 @default.
- W2005374257 doi "https://doi.org/10.1016/0168-583x(91)96230-i" @default.
- W2005374257 hasPublicationYear "1991" @default.
- W2005374257 type Work @default.
- W2005374257 sameAs 2005374257 @default.
- W2005374257 citedByCount "7" @default.
- W2005374257 crossrefType "journal-article" @default.
- W2005374257 hasAuthorship W2005374257A5013224471 @default.
- W2005374257 hasAuthorship W2005374257A5020390079 @default.
- W2005374257 hasAuthorship W2005374257A5040585430 @default.
- W2005374257 hasAuthorship W2005374257A5065475514 @default.
- W2005374257 hasAuthorship W2005374257A5071565486 @default.
- W2005374257 hasAuthorship W2005374257A5079752209 @default.
- W2005374257 hasConcept C113196181 @default.
- W2005374257 hasConcept C121332964 @default.
- W2005374257 hasConcept C145148216 @default.
- W2005374257 hasConcept C146904657 @default.
- W2005374257 hasConcept C159985019 @default.
- W2005374257 hasConcept C160671074 @default.
- W2005374257 hasConcept C178790620 @default.
- W2005374257 hasConcept C184779094 @default.
- W2005374257 hasConcept C185544564 @default.
- W2005374257 hasConcept C185592680 @default.
- W2005374257 hasConcept C192562407 @default.
- W2005374257 hasConcept C204323151 @default.
- W2005374257 hasConcept C207521374 @default.
- W2005374257 hasConcept C41823505 @default.
- W2005374257 hasConcept C43617362 @default.
- W2005374257 hasConcept C49040817 @default.
- W2005374257 hasConcept C501308230 @default.
- W2005374257 hasConcept C50774322 @default.
- W2005374257 hasConcept C544956773 @default.
- W2005374257 hasConcept C78434282 @default.
- W2005374257 hasConceptScore W2005374257C113196181 @default.
- W2005374257 hasConceptScore W2005374257C121332964 @default.
- W2005374257 hasConceptScore W2005374257C145148216 @default.
- W2005374257 hasConceptScore W2005374257C146904657 @default.
- W2005374257 hasConceptScore W2005374257C159985019 @default.
- W2005374257 hasConceptScore W2005374257C160671074 @default.
- W2005374257 hasConceptScore W2005374257C178790620 @default.
- W2005374257 hasConceptScore W2005374257C184779094 @default.
- W2005374257 hasConceptScore W2005374257C185544564 @default.
- W2005374257 hasConceptScore W2005374257C185592680 @default.
- W2005374257 hasConceptScore W2005374257C192562407 @default.
- W2005374257 hasConceptScore W2005374257C204323151 @default.
- W2005374257 hasConceptScore W2005374257C207521374 @default.
- W2005374257 hasConceptScore W2005374257C41823505 @default.
- W2005374257 hasConceptScore W2005374257C43617362 @default.
- W2005374257 hasConceptScore W2005374257C49040817 @default.
- W2005374257 hasConceptScore W2005374257C501308230 @default.
- W2005374257 hasConceptScore W2005374257C50774322 @default.
- W2005374257 hasConceptScore W2005374257C544956773 @default.
- W2005374257 hasConceptScore W2005374257C78434282 @default.
- W2005374257 hasLocation W20053742571 @default.
- W2005374257 hasOpenAccess W2005374257 @default.
- W2005374257 hasPrimaryLocation W20053742571 @default.
- W2005374257 hasRelatedWork W105148459 @default.
- W2005374257 hasRelatedWork W105836379 @default.
- W2005374257 hasRelatedWork W122199711 @default.
- W2005374257 hasRelatedWork W1480919986 @default.
- W2005374257 hasRelatedWork W1973143892 @default.
- W2005374257 hasRelatedWork W1988018590 @default.
- W2005374257 hasRelatedWork W1991458446 @default.
- W2005374257 hasRelatedWork W2002129150 @default.
- W2005374257 hasRelatedWork W2004622113 @default.
- W2005374257 hasRelatedWork W2008804422 @default.
- W2005374257 hasRelatedWork W2014251813 @default.
- W2005374257 hasRelatedWork W2031195655 @default.
- W2005374257 hasRelatedWork W2042947652 @default.
- W2005374257 hasRelatedWork W2043761241 @default.
- W2005374257 hasRelatedWork W2054572092 @default.
- W2005374257 hasRelatedWork W2057614609 @default.
- W2005374257 hasRelatedWork W2083397591 @default.
- W2005374257 hasRelatedWork W2107909730 @default.
- W2005374257 hasRelatedWork W2135636578 @default.
- W2005374257 hasRelatedWork W2097450129 @default.
- W2005374257 isParatext "false" @default.
- W2005374257 isRetracted "false" @default.
- W2005374257 magId "2005374257" @default.
- W2005374257 workType "article" @default.