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- W2005403509 abstract "An infrared sensor based on a vertically integrated double layer (VIDL) thermopile which comprises of 96 thermocouples on a suspended membrane has been designed and fabricated by a CMOS-compatible process. The properties of this thermopile are characterized. The responsivity (Rs) of the VIDL thermopile is 202.8V/W and the detectivity (D*) of it is 2.85×10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>8</sup> cmHz <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>1/2</sup> W <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-1</sup> ." @default.
- W2005403509 created "2016-06-24" @default.
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- W2005403509 date "2013-01-01" @default.
- W2005403509 modified "2023-09-23" @default.
- W2005403509 title "CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers" @default.
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- W2005403509 doi "https://doi.org/10.1109/memsys.2013.6474270" @default.
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