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- W2005436609 abstract "GaAs/AlGaAs and InGaP membrane bridges micromachined on GaAs substrates have been developed for use as supporting micromechanical structures for coplanar waveguides. The internal mechanical stresses potentially induced in these micromechanical devices are evaluated analytically, and also by both the acoustic pressure bulging method and free cantilever deformation measurement. The microwave transmission properties of the micromechanical coplanar waveguides are investigated. The amplitude attenuation at a frequency of 20 GHz is found to be 1.3 dB mm−1 for GaAs/AlGaAs bridge-based devices of a length of 900 μm and a slot of 3 μm. We discuss the potential applications of the fabricated micromechanical devices." @default.
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- W2005436609 date "2002-06-14" @default.
- W2005436609 modified "2023-10-18" @default.
- W2005436609 title "Coplanar waveguides supported by InGaP and GaAs/AlGaAs membrane-like bridges" @default.
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- W2005436609 doi "https://doi.org/10.1088/0960-1317/12/4/320" @default.
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