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- W2005444315 abstract "We report on the optimum design of illumination aperture with high throughput on ArF exposure system. The quadrupole illumination in the modified illumination methods has a problem to decrease throughput due to the shortage of transmission light passing the pole of the aperture comparing with the conventional illumination. In this paper, we suggest the new quadrupole structure to define 0.15micrometers line and space patterns with high throughput on the ArF exposure system with 0.55 NA." @default.
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- W2005444315 date "1999-07-26" @default.
- W2005444315 modified "2023-09-23" @default.
- W2005444315 title "Design of illumination aperture for ArF exposure system with wide exposing latitude" @default.
- W2005444315 doi "https://doi.org/10.1117/12.354397" @default.
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