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- W2005454939 abstract "An elastic recoil detection technique has been developed to depth profile light isotopes (A≲35) in low-atomic-mass solids (A≲16). It utilizes the maximum-scattering-angle property rather than an absorber to reduce background, with resultant depth precision of about ±2 μg/cm2 (100 Å). The sensitivity is ?5×1016 atoms/cm2 for isotopes lighter than the substrate and ?1015 atoms/cm2 for heavier ones." @default.
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- W2005454939 date "1980-02-01" @default.
- W2005454939 modified "2023-10-03" @default.
- W2005454939 title "High precision depth profiling of light isotopes in low-atomic-mass solids" @default.
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- W2005454939 doi "https://doi.org/10.1063/1.327703" @default.
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