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- W2005456482 abstract "The VO 2 microbolometer has been prepared by micro electrical mechanical system (MEMS) bulk-silicon process for the application of infrared gas detection. The characteristic of the prepared microbolometer is tested. The experiments are carried out for detecting CO 2 gas concentration using the VO 2 microbolometer as detector. The results show that the responsibility is ~18.1kV/W, the detectivity is about 1.37×108cmHz1/2/W, and the thermal time constant is ~72.4ms. The gas sensing results shows that the prepared microbolometer can be used for CO 2 gas sensing." @default.
- W2005456482 created "2016-06-24" @default.
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- W2005456482 date "2010-05-01" @default.
- W2005456482 modified "2023-09-27" @default.
- W2005456482 title "Preparation of VO<inf>2</inf> microbolometer for CO<inf>2</inf> gas detection" @default.
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- W2005456482 doi "https://doi.org/10.1109/icmmt.2010.5524843" @default.
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