FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005459813> ?p ?o ?g. }

• W2005459813 endingPage "S11" @default.
• W2005459813 startingPage "S6" @default.
• W2005459813 abstract "Abstract A multiscale–multi-hierarchy approach, based on a succession of simplified models, was used to describe the deposition and the film morphology evolution during the epitaxial silicon carbide deposition in an industrial hot wall reactor. The attention was focused on the system involving chlorinated species because of its superior performances with respect the traditional silane/hydrocarbons process. The evolution of the crystalline structure (i.e., from poly to single) and of the surface roughness can be understood by simply comparing two characteristic times, like those inherent the surface diffusion and the matter supply to the surface. Two other characteristic times were introduced to describe through a kinetic Monte Carlo model the line defects formation." @default.
• W2005459813 created "2016-06-24" @default.
• W2005459813 creator A5002742453 @default.
• W2005459813 creator A5003019769 @default.
• W2005459813 creator A5058619961 @default.
• W2005459813 creator A5076982732 @default.
• W2005459813 creator A5090934399 @default.
• W2005459813 date "2010-01-01" @default.
• W2005459813 modified "2023-09-27" @default.
• W2005459813 title "Multiscale simulation for epitaxial silicon carbide growth by chlorides route" @default.
• W2005459813 cites W1965571863 @default.
• W2005459813 cites W1966369780 @default.
• W2005459813 cites W1979015306 @default.
• W2005459813 cites W1986857236 @default.
• W2005459813 cites W1991261354 @default.
• W2005459813 cites W1997648461 @default.
• W2005459813 cites W2002257427 @default.
• W2005459813 cites W2009175380 @default.
• W2005459813 cites W2017636308 @default.
• W2005459813 cites W2022265639 @default.
• W2005459813 cites W2040414272 @default.
• W2005459813 cites W2043938859 @default.
• W2005459813 cites W2047005761 @default.
• W2005459813 cites W2049786710 @default.
• W2005459813 cites W2050840818 @default.
• W2005459813 cites W2053140548 @default.
• W2005459813 cites W2060265904 @default.
• W2005459813 cites W2063307423 @default.
• W2005459813 cites W2070136024 @default.
• W2005459813 cites W2070730108 @default.
• W2005459813 cites W2074488693 @default.
• W2005459813 cites W2090723667 @default.
• W2005459813 doi "https://doi.org/10.1016/j.tsf.2009.10.045" @default.
• W2005459813 hasPublicationYear "2010" @default.
• W2005459813 type Work @default.
• W2005459813 sameAs 2005459813 @default.
• W2005459813 citedByCount "3" @default.
• W2005459813 countsByYear W20054598132020 @default.
• W2005459813 crossrefType "journal-article" @default.
• W2005459813 hasAuthorship W2005459813A5002742453 @default.
• W2005459813 hasAuthorship W2005459813A5003019769 @default.
• W2005459813 hasAuthorship W2005459813A5058619961 @default.
• W2005459813 hasAuthorship W2005459813A5076982732 @default.
• W2005459813 hasAuthorship W2005459813A5090934399 @default.
• W2005459813 hasConcept C105795698 @default.
• W2005459813 hasConcept C107365816 @default.
• W2005459813 hasConcept C110738630 @default.
• W2005459813 hasConcept C121332964 @default.
• W2005459813 hasConcept C127313418 @default.
• W2005459813 hasConcept C127413603 @default.
• W2005459813 hasConcept C151730666 @default.
• W2005459813 hasConcept C159467904 @default.
• W2005459813 hasConcept C159985019 @default.
• W2005459813 hasConcept C162324750 @default.
• W2005459813 hasConcept C171250308 @default.
• W2005459813 hasConcept C185592680 @default.
• W2005459813 hasConcept C192562407 @default.
• W2005459813 hasConcept C19499675 @default.
• W2005459813 hasConcept C2778024649 @default.
• W2005459813 hasConcept C2779227376 @default.
• W2005459813 hasConcept C2780722187 @default.
• W2005459813 hasConcept C2816523 @default.
• W2005459813 hasConcept C31170391 @default.
• W2005459813 hasConcept C33923547 @default.
• W2005459813 hasConcept C34447519 @default.
• W2005459813 hasConcept C42360764 @default.
• W2005459813 hasConcept C45786274 @default.
• W2005459813 hasConcept C49040817 @default.
• W2005459813 hasConcept C5335593 @default.
• W2005459813 hasConcept C544956773 @default.
• W2005459813 hasConcept C64297162 @default.
• W2005459813 hasConcept C69357855 @default.
• W2005459813 hasConcept C71039073 @default.
• W2005459813 hasConcept C97355855 @default.
• W2005459813 hasConceptScore W2005459813C105795698 @default.
• W2005459813 hasConceptScore W2005459813C107365816 @default.
• W2005459813 hasConceptScore W2005459813C110738630 @default.
• W2005459813 hasConceptScore W2005459813C121332964 @default.
• W2005459813 hasConceptScore W2005459813C127313418 @default.
• W2005459813 hasConceptScore W2005459813C127413603 @default.
• W2005459813 hasConceptScore W2005459813C151730666 @default.
• W2005459813 hasConceptScore W2005459813C159467904 @default.
• W2005459813 hasConceptScore W2005459813C159985019 @default.
• W2005459813 hasConceptScore W2005459813C162324750 @default.
• W2005459813 hasConceptScore W2005459813C171250308 @default.
• W2005459813 hasConceptScore W2005459813C185592680 @default.
• W2005459813 hasConceptScore W2005459813C192562407 @default.
• W2005459813 hasConceptScore W2005459813C19499675 @default.
• W2005459813 hasConceptScore W2005459813C2778024649 @default.
• W2005459813 hasConceptScore W2005459813C2779227376 @default.
• W2005459813 hasConceptScore W2005459813C2780722187 @default.
• W2005459813 hasConceptScore W2005459813C2816523 @default.
• W2005459813 hasConceptScore W2005459813C31170391 @default.
• W2005459813 hasConceptScore W2005459813C33923547 @default.
• W2005459813 hasConceptScore W2005459813C34447519 @default.
• W2005459813 hasConceptScore W2005459813C42360764 @default.
• W2005459813 hasConceptScore W2005459813C45786274 @default.
• W2005459813 hasConceptScore W2005459813C49040817 @default.

• next