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- W2005483502 abstract "Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes. We quantify the variations and analyze its effect on the performance of a constant CMRA sensor. Finite element analysis was used to verify the effective mass and stiffness of the structure and overall performance was analyzed using lumped mass parameter model. From the results we found that the variations may cause some reduction on the CMRA performance. However, the variations may naturally stagger the mass of the constant CMRA to produce unique output signals with which any mass changes should be able to be detected." @default.
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- W2005483502 date "2009-09-01" @default.
- W2005483502 modified "2023-09-23" @default.
- W2005483502 title "Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor" @default.
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- W2005483502 doi "https://doi.org/10.1016/j.proche.2009.07.207" @default.
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