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- W2005546722 abstract "Using the rotation of the susceptor, the lateral homogeneity of the epilayers can be improved in a horizontal MOVPE-reactor, but the uniformity of the composition along the growth direction has been neither theoretically nor experimentally studied. In this paper the model developed by Xu et al. [J. Crystal Growth 187 (1998) 203] has been applied to discuss both the lateral and vertical homogeneity of ternary alloys grown on the rotating susceptor in a horizontal MOVPE-reactor. The model calculation has revealed that the rotation results in a lateral uniformity, but at the same time it also causes a periodical variation of the composition in the growth direction." @default.
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- W2005546722 date "1998-10-01" @default.
- W2005546722 modified "2023-09-26" @default.
- W2005546722 title "Analysis compositional homogeneity for MOVPE grown ternary alloys in the horizontal reactor with a rotating susceptor" @default.
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- W2005546722 doi "https://doi.org/10.1016/s0022-0248(98)00614-9" @default.
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