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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005646277> ?p ?o ?g. }

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• W2005646277 abstract "Silicon was oxidized by a collimated hyperthermal ozone beam produced by pulsed-laser ablation of solid ozone to increase the controllability of the silicon dioxide film thickness and to achieve low-temperature oxidation. The oxidation rate could be accurately controlled by the number of laser shots to which the number of supplied ozone molecules was proportional. Ozone molecules with a translational energy of around 1 eV obtained by laser ablation produced an initially rapid oxidized region with no temperature dependence in which a 0.6 nm silicon dioxide film could be synthesized at room temperature with only 200 laser shots. Higher-efficiency oxidation was also achieved in comparison with that by using a spray of ozone with thermal energy." @default.
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• W2005646277 date "2001-07-16" @default.
• W2005646277 modified "2023-09-24" @default.
• W2005646277 title "Enhanced oxidation of silicon using a collimated hyperthermal ozone beam" @default.
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• W2005646277 doi "https://doi.org/10.1063/1.1380242" @default.
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