FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005648145> ?p ?o ?g. }

• W2005648145 endingPage "1948" @default.
• W2005648145 startingPage "1944" @default.
• W2005648145 abstract "A number of different plasma chemistries have been investigated for the etching of oxides (indium tin oxide for conductive electrodes; alumina/titania and Al2O3 for insulators) and phosphors (SrS, ZnS) used in thin film electroluminescent displays. Under high ion density conditions, such as in an electron cyclotron resonance source, maximum etch rates above 1500 Å/min are obtained for ZnS in Cl2/Ar, BCl3/Ar, and SF6/Ar, for SrS in SF6/Ar and CH4/H2/Ar, for ITO in CH4/H2/Ar and for ATO in SF6/Ar. The etching is ion activated under most conditions, producing good feature anisotropy. Near-surface stoichiometry could generally be maintained on the etched surfaces of all materials except SrS where we invariably detected strong preferential loss of S. An optimized process for etching a typical metal-insulators-semiconductor-insulator-metal stack would involve switching plasma chemistries for each individual layer, but we have successfully patterned such a stack using only the CH4/H2/Ar chemistry." @default.
• W2005648145 created "2016-06-24" @default.
• W2005648145 creator A5006457351 @default.
• W2005648145 creator A5030751696 @default.
• W2005648145 creator A5048005381 @default.
• W2005648145 creator A5061397004 @default.
• W2005648145 creator A5085381025 @default.
• W2005648145 creator A5086482558 @default.
• W2005648145 creator A5087148215 @default.
• W2005648145 creator A5091851475 @default.
• W2005648145 date "1998-05-01" @default.
• W2005648145 modified "2023-10-16" @default.
• W2005648145 title "Electron cyclotron resonance plasma etching of oxides and SrS and ZnS-based electroluminescent materials for flat panel displays" @default.
• W2005648145 cites W1993570056 @default.
• W2005648145 cites W2000774876 @default.
• W2005648145 cites W2001802462 @default.
• W2005648145 cites W2007532634 @default.
• W2005648145 cites W2019052097 @default.
• W2005648145 cites W2022951270 @default.
• W2005648145 cites W2067502445 @default.
• W2005648145 cites W2070101687 @default.
• W2005648145 cites W2100197226 @default.
• W2005648145 cites W2119070799 @default.
• W2005648145 cites W4365364585 @default.
• W2005648145 doi "https://doi.org/10.1116/1.581201" @default.
• W2005648145 hasPublicationYear "1998" @default.
• W2005648145 type Work @default.
• W2005648145 sameAs 2005648145 @default.
• W2005648145 citedByCount "6" @default.
• W2005648145 crossrefType "journal-article" @default.
• W2005648145 hasAuthorship W2005648145A5006457351 @default.
• W2005648145 hasAuthorship W2005648145A5030751696 @default.
• W2005648145 hasAuthorship W2005648145A5048005381 @default.
• W2005648145 hasAuthorship W2005648145A5061397004 @default.
• W2005648145 hasAuthorship W2005648145A5085381025 @default.
• W2005648145 hasAuthorship W2005648145A5086482558 @default.
• W2005648145 hasAuthorship W2005648145A5087148215 @default.
• W2005648145 hasAuthorship W2005648145A5091851475 @default.
• W2005648145 hasConcept C100460472 @default.
• W2005648145 hasConcept C107043475 @default.
• W2005648145 hasConcept C107187091 @default.
• W2005648145 hasConcept C113196181 @default.
• W2005648145 hasConcept C121332964 @default.
• W2005648145 hasConcept C130472188 @default.
• W2005648145 hasConcept C145148216 @default.
• W2005648145 hasConcept C147789679 @default.
• W2005648145 hasConcept C171250308 @default.
• W2005648145 hasConcept C17525397 @default.
• W2005648145 hasConcept C175361016 @default.
• W2005648145 hasConcept C178790620 @default.
• W2005648145 hasConcept C185592680 @default.
• W2005648145 hasConcept C192562407 @default.
• W2005648145 hasConcept C197489587 @default.
• W2005648145 hasConcept C2779227376 @default.
• W2005648145 hasConcept C31625292 @default.
• W2005648145 hasConcept C43617362 @default.
• W2005648145 hasConcept C49040817 @default.
• W2005648145 hasConcept C543292547 @default.
• W2005648145 hasConcept C62520636 @default.
• W2005648145 hasConcept C82706917 @default.
• W2005648145 hasConceptScore W2005648145C100460472 @default.
• W2005648145 hasConceptScore W2005648145C107043475 @default.
• W2005648145 hasConceptScore W2005648145C107187091 @default.
• W2005648145 hasConceptScore W2005648145C113196181 @default.
• W2005648145 hasConceptScore W2005648145C121332964 @default.
• W2005648145 hasConceptScore W2005648145C130472188 @default.
• W2005648145 hasConceptScore W2005648145C145148216 @default.
• W2005648145 hasConceptScore W2005648145C147789679 @default.
• W2005648145 hasConceptScore W2005648145C171250308 @default.
• W2005648145 hasConceptScore W2005648145C17525397 @default.
• W2005648145 hasConceptScore W2005648145C175361016 @default.
• W2005648145 hasConceptScore W2005648145C178790620 @default.
• W2005648145 hasConceptScore W2005648145C185592680 @default.
• W2005648145 hasConceptScore W2005648145C192562407 @default.
• W2005648145 hasConceptScore W2005648145C197489587 @default.
• W2005648145 hasConceptScore W2005648145C2779227376 @default.
• W2005648145 hasConceptScore W2005648145C31625292 @default.
• W2005648145 hasConceptScore W2005648145C43617362 @default.
• W2005648145 hasConceptScore W2005648145C49040817 @default.
• W2005648145 hasConceptScore W2005648145C543292547 @default.
• W2005648145 hasConceptScore W2005648145C62520636 @default.
• W2005648145 hasConceptScore W2005648145C82706917 @default.
• W2005648145 hasIssue "3" @default.
• W2005648145 hasLocation W20056481451 @default.
• W2005648145 hasOpenAccess W2005648145 @default.
• W2005648145 hasPrimaryLocation W20056481451 @default.
• W2005648145 hasRelatedWork W1980089317 @default.
• W2005648145 hasRelatedWork W1992919011 @default.
• W2005648145 hasRelatedWork W2005648145 @default.
• W2005648145 hasRelatedWork W2032552246 @default.
• W2005648145 hasRelatedWork W2034252264 @default.
• W2005648145 hasRelatedWork W2040702042 @default.
• W2005648145 hasRelatedWork W2045553774 @default.
• W2005648145 hasRelatedWork W2046861793 @default.
• W2005648145 hasRelatedWork W2092814893 @default.
• W2005648145 hasRelatedWork W849260343 @default.
• W2005648145 hasVolume "16" @default.
• W2005648145 isParatext "false" @default.

• next