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- W2005657442 abstract "The theoretical sputtering yield, including anisotropic effects, has been derived. The theoretical results are based on a recent unified theory for collisional sputtering and have been compared with the transport theory and experimental results." @default.
- W2005657442 created "2016-06-24" @default.
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- W2005657442 date "1988-05-01" @default.
- W2005657442 modified "2023-09-25" @default.
- W2005657442 title "Sputtering yield including anisotropic effects" @default.
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- W2005657442 doi "https://doi.org/10.1016/0375-9601(88)90143-0" @default.
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