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- W2005659596 abstract "This paper describes a modification of the conventional gas condensation processing apparatus in which the usual evaporative source is replaced by a chemical source. The new system combines rapid thermal decomposition and expansion of a precursor gas stream with rapid condensation of the product species on a cold substrate. We have demonstrated the feasibility of synthesizing loosely agglomerated nanoparticles (6 to 10nm) of SiCxNy, starting from hexamethyldisilazane as precursor compound. Critical to the success of this new chemical vapor condensation method (CVC) are: (1) low concentration of precursor in the carrier gas, (2) rapid expansion of the gas stream through an uniformly heated tubular reactor, and (3) rapid quenching of the gas phase nucleated clusters or nanoparticles as they exit from the reactor tube." @default.
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- W2005659596 date "1994-05-01" @default.
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- W2005659596 title "Chemical vapor condensation of nanostructured ceramic powders" @default.
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- W2005659596 doi "https://doi.org/10.1016/0965-9773(94)90144-9" @default.
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