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- W2005668493 abstract "The application of the Monte Carlo methods to investigate ion implantation and atomic mixing mechanisms in solids is discussed. Multiple-energy ion implantations when the energies are applied in different orders show marked differences in concentration distributions according to the limited experimental results available. The Monte Carlo simulation model (EVOLVE) applied to two different systems shows interesting details of the atomic changes which take place in a multiple-energy ion implantation." @default.
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- W2005668493 title "Multiple-energy ion implantation effects on distribution profiles: A Monte Carlo case study" @default.
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- W2005668493 doi "https://doi.org/10.1016/0025-5416(85)90366-0" @default.
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