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- W2005778145 abstract "This letter presents a first demonstration of a monolithic sapphire Fabry-Pérot (FP) cavity for pressure sensing. The prototype was constructed by combining reactive ion etching with direct wafer bonding. Long-term testing proves that the adhesive-free wafer bond is sufficient to create a sealed FP cavity as a pressure transducer. Pressure measurement over a range of 0.04-1.38 MPa has been demonstrated at room temperature using white-light interferometry. With an all-sapphire configuration, the prototype reported here can be further developed into a pressure sensor with high-temperature harsh-environment capability." @default.
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- W2005778145 date "2010-01-01" @default.
- W2005778145 modified "2023-10-16" @default.
- W2005778145 title "Demonstration of an All-Sapphire Fabry–Pérot Cavity for Pressure Sensing" @default.
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- W2005778145 doi "https://doi.org/10.1109/lpt.2010.2089614" @default.
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