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- W2005809265 abstract "Growth of GaAs, AlAs and AlGaAs using source materials of TMG, TEG, TMA and TEA has been studied in a low pressure MOVPE system. The different growth rates of the binary compounds for different sources indicate that the growth is characterized by the diffusion of non-decomposed and non-reacted metalorganics through the stagnant layer. An enhanced incorporation of Al into the solid compared to that of Ga has resulted upon mixing the metalorganics for the growth of AlGaAs. A discussion on the results in terms of the alkyl exchange interaction between metalorganics is presented." @default.
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- W2005809265 date "1984-09-01" @default.
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- W2005809265 title "AlGaAs growth using trimethyl and triethyl compound sources" @default.
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- W2005809265 doi "https://doi.org/10.1016/0022-0248(84)90409-3" @default.
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