Matches in SemOpenAlex for { <https://semopenalex.org/work/W2005931808> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2005931808 endingPage "195" @default.
- W2005931808 startingPage "185" @default.
- W2005931808 abstract "The effectiveness of surfactants (sodium dodecyl sulfate and dodecyl amine hydrochloride) in the cleaning of silicon wafers has been investigated using atomic force microscopy and image analysis. Recognizing that the surface of SC-1-cleaned silicon wafers is essentially SiO2 atomic force microscopy was used to determine the interaction forces for the silica/silica and silica/alumina systems with and without surfactant present in solution. Experimental force vs. separation distance curves were found to be in good agreement with theoretical predictions based on electrostatic and van der Waals interactions. Interestingly, the pull-off forces obtained from atomic force microscopy measurements were very close to the adhesion forces calculated on the basis of van der Waals interactions at very close separations. The results from image analysis further confirmed the usefulness of surfactants in reducing particle adhesion and their effectiveness in cleaning silicon wafers. Finally, the results from this study suggest that a more complete understanding of particle interaction forces should be of considerable importance to the electronics industry." @default.
- W2005931808 created "2016-06-24" @default.
- W2005931808 creator A5041601205 @default.
- W2005931808 creator A5044821586 @default.
- W2005931808 creator A5070640379 @default.
- W2005931808 date "1998-01-01" @default.
- W2005931808 modified "2023-10-01" @default.
- W2005931808 title "Usefulness of surfactants in reducing particle adhesion and their effectiveness in cleaning silicon wafers" @default.
- W2005931808 cites W1969233411 @default.
- W2005931808 cites W1979514127 @default.
- W2005931808 cites W1989626441 @default.
- W2005931808 cites W1995599257 @default.
- W2005931808 cites W2033636044 @default.
- W2005931808 cites W2053552323 @default.
- W2005931808 cites W2064116342 @default.
- W2005931808 cites W2075194566 @default.
- W2005931808 cites W2097427246 @default.
- W2005931808 cites W2107553265 @default.
- W2005931808 cites W2138812979 @default.
- W2005931808 cites W2164015641 @default.
- W2005931808 cites W2168325148 @default.
- W2005931808 doi "https://doi.org/10.1163/156856198x00056" @default.
- W2005931808 hasPublicationYear "1998" @default.
- W2005931808 type Work @default.
- W2005931808 sameAs 2005931808 @default.
- W2005931808 citedByCount "10" @default.
- W2005931808 countsByYear W20059318082015 @default.
- W2005931808 countsByYear W20059318082016 @default.
- W2005931808 countsByYear W20059318082017 @default.
- W2005931808 countsByYear W20059318082020 @default.
- W2005931808 countsByYear W20059318082022 @default.
- W2005931808 crossrefType "journal-article" @default.
- W2005931808 hasAuthorship W2005931808A5041601205 @default.
- W2005931808 hasAuthorship W2005931808A5044821586 @default.
- W2005931808 hasAuthorship W2005931808A5070640379 @default.
- W2005931808 hasConcept C102951782 @default.
- W2005931808 hasConcept C111368507 @default.
- W2005931808 hasConcept C126061179 @default.
- W2005931808 hasConcept C127313418 @default.
- W2005931808 hasConcept C127413603 @default.
- W2005931808 hasConcept C159985019 @default.
- W2005931808 hasConcept C160671074 @default.
- W2005931808 hasConcept C171250308 @default.
- W2005931808 hasConcept C178790620 @default.
- W2005931808 hasConcept C185592680 @default.
- W2005931808 hasConcept C192562407 @default.
- W2005931808 hasConcept C2778517922 @default.
- W2005931808 hasConcept C2778913249 @default.
- W2005931808 hasConcept C32909587 @default.
- W2005931808 hasConcept C42360764 @default.
- W2005931808 hasConcept C43617362 @default.
- W2005931808 hasConcept C49040817 @default.
- W2005931808 hasConcept C544956773 @default.
- W2005931808 hasConcept C58226133 @default.
- W2005931808 hasConcept C84416704 @default.
- W2005931808 hasConceptScore W2005931808C102951782 @default.
- W2005931808 hasConceptScore W2005931808C111368507 @default.
- W2005931808 hasConceptScore W2005931808C126061179 @default.
- W2005931808 hasConceptScore W2005931808C127313418 @default.
- W2005931808 hasConceptScore W2005931808C127413603 @default.
- W2005931808 hasConceptScore W2005931808C159985019 @default.
- W2005931808 hasConceptScore W2005931808C160671074 @default.
- W2005931808 hasConceptScore W2005931808C171250308 @default.
- W2005931808 hasConceptScore W2005931808C178790620 @default.
- W2005931808 hasConceptScore W2005931808C185592680 @default.
- W2005931808 hasConceptScore W2005931808C192562407 @default.
- W2005931808 hasConceptScore W2005931808C2778517922 @default.
- W2005931808 hasConceptScore W2005931808C2778913249 @default.
- W2005931808 hasConceptScore W2005931808C32909587 @default.
- W2005931808 hasConceptScore W2005931808C42360764 @default.
- W2005931808 hasConceptScore W2005931808C43617362 @default.
- W2005931808 hasConceptScore W2005931808C49040817 @default.
- W2005931808 hasConceptScore W2005931808C544956773 @default.
- W2005931808 hasConceptScore W2005931808C58226133 @default.
- W2005931808 hasConceptScore W2005931808C84416704 @default.
- W2005931808 hasIssue "2" @default.
- W2005931808 hasLocation W20059318081 @default.
- W2005931808 hasOpenAccess W2005931808 @default.
- W2005931808 hasPrimaryLocation W20059318081 @default.
- W2005931808 hasRelatedWork W1990078541 @default.
- W2005931808 hasRelatedWork W2024942214 @default.
- W2005931808 hasRelatedWork W2052341660 @default.
- W2005931808 hasRelatedWork W2086068280 @default.
- W2005931808 hasRelatedWork W2111830557 @default.
- W2005931808 hasRelatedWork W2350457537 @default.
- W2005931808 hasRelatedWork W2883991722 @default.
- W2005931808 hasRelatedWork W3178425939 @default.
- W2005931808 hasRelatedWork W4200313348 @default.
- W2005931808 hasRelatedWork W4309565824 @default.
- W2005931808 hasVolume "12" @default.
- W2005931808 isParatext "false" @default.
- W2005931808 isRetracted "false" @default.
- W2005931808 magId "2005931808" @default.
- W2005931808 workType "article" @default.