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- W2005961783 abstract "Microlithography on, for example semiconductor substrates for making microchips, can in present industrial practice create structures with detail on a scale no smaller than 1-2 μm; this is because visible or very near ultraviolet light is used to produce images on the lithographic resist and the resolution is limited by the wavelength. Excimer lasers produce intense beams of light of wavelengths down to and below 193 nm and the properties of the laser light are in many other ways well adapted to microlithography. The development of appropriate optical systems and some initial experiments with silicon as substrate are described." @default.
- W2005961783 created "2016-06-24" @default.
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- W2005961783 date "1988-10-08" @default.
- W2005961783 modified "2023-10-04" @default.
- W2005961783 title "The Clifford Paterson Lecture, 1988 - Microlithography and the ultraviolet: experiments with an excimer laser" @default.
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- W2005961783 doi "https://doi.org/10.1098/rspa.1988.0102" @default.
- W2005961783 hasPublicationYear "1988" @default.
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