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• W2006076397 endingPage "2392" @default.
• W2006076397 startingPage "2383" @default.
• W2006076397 abstract "The role of crystallographic texture in electromigration resistance of interconnect lines is well documented. The presence of a strong (111) fiber texture results in a more reliable interconnect structure. It is also generally accepted that grain-boundary diffusion is the primary mechanism by which electromigration failures occur. It has been difficult to this point, however, to obtain statistically reliable information of grain-boundary structure in these materials as transmission electron microscopy investigations are limited by tedious specimen preparation and small, nonrepresentative, imaging regions. The present work focuses upon characterization of texture and grain-boundary structure of interconnect lines using orientation imaging microscopy, and particularly, upon the linewidth dependence of these measures. Conventionally processed Al–1%Cu lines were investigated to determine the affects of a postpatterning anneal on boundary structure as a function of linewidth. It was observed that texture tended to strengthen slightly with decreasing linewidth subsequent to the anneal procedure. Grain morphology changed substantially as the narrow lines became near bamboo in character and the crystallographic character of the boundary plane changed as a function of linewidth. These results are contrasted with those obtained from Al–1%Cu lines, which were fabricated using the damascene process. The damascene lines show a marked weakening in texture as the linewidth decreases, accompanied by a more random misorientation distribution. A description of the competing energetics, which result in the observed microstructures, is included." @default.
• W2006076397 created "2016-06-24" @default.
• W2006076397 creator A5065391995 @default.
• W2006076397 creator A5069394130 @default.
• W2006076397 creator A5073665158 @default.
• W2006076397 creator A5083848459 @default.
• W2006076397 date "1997-09-01" @default.
• W2006076397 modified "2023-10-17" @default.
• W2006076397 title "Analysis of grain-boundary structure in Al–Cu interconnects" @default.
• W2006076397 cites W1965224884 @default.
• W2006076397 cites W1968386639 @default.
• W2006076397 cites W1973947465 @default.
• W2006076397 cites W1977883208 @default.
• W2006076397 cites W1983510800 @default.
• W2006076397 cites W1991125548 @default.
• W2006076397 cites W2002063015 @default.
• W2006076397 cites W2010052094 @default.
• W2006076397 cites W2012301517 @default.
• W2006076397 cites W2050104618 @default.
• W2006076397 cites W2052594650 @default.
• W2006076397 cites W2052773937 @default.
• W2006076397 cites W2054588277 @default.
• W2006076397 cites W2054732887 @default.
• W2006076397 cites W2061032298 @default.
• W2006076397 cites W2066741009 @default.
• W2006076397 cites W2068151579 @default.
• W2006076397 cites W2070059932 @default.
• W2006076397 cites W2084791248 @default.
• W2006076397 cites W2093692670 @default.
• W2006076397 cites W2125657745 @default.
• W2006076397 cites W2145607948 @default.
• W2006076397 cites W2316042869 @default.
• W2006076397 cites W2321031581 @default.
• W2006076397 cites W2322975852 @default.
• W2006076397 cites W2331030220 @default.
• W2006076397 cites W3187900922 @default.
• W2006076397 doi "https://doi.org/10.1063/1.365763" @default.
• W2006076397 hasPublicationYear "1997" @default.
• W2006076397 type Work @default.
• W2006076397 sameAs 2006076397 @default.
• W2006076397 citedByCount "35" @default.
• W2006076397 countsByYear W20060763972012 @default.
• W2006076397 countsByYear W20060763972013 @default.
• W2006076397 countsByYear W20060763972015 @default.
• W2006076397 countsByYear W20060763972018 @default.
• W2006076397 countsByYear W20060763972019 @default.
• W2006076397 countsByYear W20060763972021 @default.
• W2006076397 countsByYear W20060763972022 @default.
• W2006076397 crossrefType "journal-article" @default.
• W2006076397 hasAuthorship W2006076397A5065391995 @default.
• W2006076397 hasAuthorship W2006076397A5069394130 @default.
• W2006076397 hasAuthorship W2006076397A5073665158 @default.
• W2006076397 hasAuthorship W2006076397A5083848459 @default.
• W2006076397 hasBestOaLocation W20060763972 @default.
• W2006076397 hasConcept C115961682 @default.
• W2006076397 hasConcept C116372231 @default.
• W2006076397 hasConcept C120665830 @default.
• W2006076397 hasConcept C121332964 @default.
• W2006076397 hasConcept C138055206 @default.
• W2006076397 hasConcept C142181693 @default.
• W2006076397 hasConcept C154945302 @default.
• W2006076397 hasConcept C159985019 @default.
• W2006076397 hasConcept C183808158 @default.
• W2006076397 hasConcept C191897082 @default.
• W2006076397 hasConcept C192562407 @default.
• W2006076397 hasConcept C26873012 @default.
• W2006076397 hasConcept C2778117898 @default.
• W2006076397 hasConcept C2781195486 @default.
• W2006076397 hasConcept C41008148 @default.
• W2006076397 hasConcept C47908070 @default.
• W2006076397 hasConcept C520434653 @default.
• W2006076397 hasConcept C544778455 @default.
• W2006076397 hasConcept C87976508 @default.
• W2006076397 hasConceptScore W2006076397C115961682 @default.
• W2006076397 hasConceptScore W2006076397C116372231 @default.
• W2006076397 hasConceptScore W2006076397C120665830 @default.
• W2006076397 hasConceptScore W2006076397C121332964 @default.
• W2006076397 hasConceptScore W2006076397C138055206 @default.
• W2006076397 hasConceptScore W2006076397C142181693 @default.
• W2006076397 hasConceptScore W2006076397C154945302 @default.
• W2006076397 hasConceptScore W2006076397C159985019 @default.
• W2006076397 hasConceptScore W2006076397C183808158 @default.
• W2006076397 hasConceptScore W2006076397C191897082 @default.
• W2006076397 hasConceptScore W2006076397C192562407 @default.
• W2006076397 hasConceptScore W2006076397C26873012 @default.
• W2006076397 hasConceptScore W2006076397C2778117898 @default.
• W2006076397 hasConceptScore W2006076397C2781195486 @default.
• W2006076397 hasConceptScore W2006076397C41008148 @default.
• W2006076397 hasConceptScore W2006076397C47908070 @default.
• W2006076397 hasConceptScore W2006076397C520434653 @default.
• W2006076397 hasConceptScore W2006076397C544778455 @default.
• W2006076397 hasConceptScore W2006076397C87976508 @default.
• W2006076397 hasIssue "5" @default.
• W2006076397 hasLocation W20060763971 @default.
• W2006076397 hasLocation W20060763972 @default.
• W2006076397 hasOpenAccess W2006076397 @default.
• W2006076397 hasPrimaryLocation W20060763971 @default.
• W2006076397 hasRelatedWork W1964311075 @default.

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