Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006099400> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2006099400 endingPage "111003" @default.
- W2006099400 startingPage "111003" @default.
- W2006099400 abstract "A new technique using WSiN film as a protective cap layer of the internal ohmic metallization scheme and the GaN surface was developed to improve the surface morphology of the contact of AlGaN/GaN high electron mobility transistors (HEMTs). After annealing, this layer was selectively removed by patterning and dry etching. Metal contact surfaces covered with WSiN preserved a good surface morphology and edge definition. Moreover, the devices have a saturation current of 1 A/mm and a maximum transconductance of 235 mS/mm. When biased at 30 V, the output power density is 5.8 W/mm at 2 GHz. These results indicate a damage-free process for the smooth ohmic contacts formation." @default.
- W2006099400 created "2016-06-24" @default.
- W2006099400 creator A5009456158 @default.
- W2006099400 creator A5013545831 @default.
- W2006099400 creator A5025920015 @default.
- W2006099400 creator A5050666896 @default.
- W2006099400 creator A5057884602 @default.
- W2006099400 creator A5071306856 @default.
- W2006099400 creator A5085260377 @default.
- W2006099400 creator A5086097177 @default.
- W2006099400 date "2009-11-20" @default.
- W2006099400 modified "2023-10-16" @default.
- W2006099400 title "WSiN Cap Layer for Improvement of Ohmic Contact Morphology in AlGaN/GaN High Electron Mobility Transistors" @default.
- W2006099400 cites W1969942669 @default.
- W2006099400 cites W1983899757 @default.
- W2006099400 cites W1985547241 @default.
- W2006099400 cites W2020511179 @default.
- W2006099400 cites W2028200935 @default.
- W2006099400 cites W2039867808 @default.
- W2006099400 cites W2040774448 @default.
- W2006099400 cites W2055810525 @default.
- W2006099400 cites W2060437062 @default.
- W2006099400 cites W2068276858 @default.
- W2006099400 cites W2099103365 @default.
- W2006099400 cites W2141632766 @default.
- W2006099400 doi "https://doi.org/10.1143/jjap.48.111003" @default.
- W2006099400 hasPublicationYear "2009" @default.
- W2006099400 type Work @default.
- W2006099400 sameAs 2006099400 @default.
- W2006099400 citedByCount "1" @default.
- W2006099400 crossrefType "journal-article" @default.
- W2006099400 hasAuthorship W2006099400A5009456158 @default.
- W2006099400 hasAuthorship W2006099400A5013545831 @default.
- W2006099400 hasAuthorship W2006099400A5025920015 @default.
- W2006099400 hasAuthorship W2006099400A5050666896 @default.
- W2006099400 hasAuthorship W2006099400A5057884602 @default.
- W2006099400 hasAuthorship W2006099400A5071306856 @default.
- W2006099400 hasAuthorship W2006099400A5085260377 @default.
- W2006099400 hasAuthorship W2006099400A5086097177 @default.
- W2006099400 hasConcept C119599485 @default.
- W2006099400 hasConcept C127413603 @default.
- W2006099400 hasConcept C138230450 @default.
- W2006099400 hasConcept C162057924 @default.
- W2006099400 hasConcept C165801399 @default.
- W2006099400 hasConcept C171250308 @default.
- W2006099400 hasConcept C172385210 @default.
- W2006099400 hasConcept C192562407 @default.
- W2006099400 hasConcept C2779227376 @default.
- W2006099400 hasConcept C49040817 @default.
- W2006099400 hasConcept C499950583 @default.
- W2006099400 hasConcept C54355233 @default.
- W2006099400 hasConcept C86803240 @default.
- W2006099400 hasConceptScore W2006099400C119599485 @default.
- W2006099400 hasConceptScore W2006099400C127413603 @default.
- W2006099400 hasConceptScore W2006099400C138230450 @default.
- W2006099400 hasConceptScore W2006099400C162057924 @default.
- W2006099400 hasConceptScore W2006099400C165801399 @default.
- W2006099400 hasConceptScore W2006099400C171250308 @default.
- W2006099400 hasConceptScore W2006099400C172385210 @default.
- W2006099400 hasConceptScore W2006099400C192562407 @default.
- W2006099400 hasConceptScore W2006099400C2779227376 @default.
- W2006099400 hasConceptScore W2006099400C49040817 @default.
- W2006099400 hasConceptScore W2006099400C499950583 @default.
- W2006099400 hasConceptScore W2006099400C54355233 @default.
- W2006099400 hasConceptScore W2006099400C86803240 @default.
- W2006099400 hasIssue "11" @default.
- W2006099400 hasLocation W20060994001 @default.
- W2006099400 hasOpenAccess W2006099400 @default.
- W2006099400 hasPrimaryLocation W20060994001 @default.
- W2006099400 hasRelatedWork W1679432894 @default.
- W2006099400 hasRelatedWork W1986606291 @default.
- W2006099400 hasRelatedWork W2033510047 @default.
- W2006099400 hasRelatedWork W2061014269 @default.
- W2006099400 hasRelatedWork W2080900488 @default.
- W2006099400 hasRelatedWork W2088860565 @default.
- W2006099400 hasRelatedWork W2130933220 @default.
- W2006099400 hasRelatedWork W2171673556 @default.
- W2006099400 hasRelatedWork W2222166432 @default.
- W2006099400 hasRelatedWork W2898540837 @default.
- W2006099400 hasVolume "48" @default.
- W2006099400 isParatext "false" @default.
- W2006099400 isRetracted "false" @default.
- W2006099400 magId "2006099400" @default.
- W2006099400 workType "article" @default.