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- W2006125185 endingPage "1216" @default.
- W2006125185 startingPage "1213" @default.
- W2006125185 abstract "This paper presents the design, fabrication and characterization of 4H-SiC trenched-and- implanted vertical JFETs (TI-VJFETs) (1). The design of TI-VJFETs with active areas of 9.38 ×10 -2 mm 2 and 2.03mm 2 and different vertical channel openings is presented based on a blocking layer of 9.4 μm, doped to n=7x10 15 cm -3 . Highly vertical channel defined by trench etching and angled implantation of Al makes it possible to accurately control the vertical channel dimension, resulting in TI-VJFETs with very low specific on-resistance. The TI-VJFET technology developed under this work is believed to be advantageous in comparison to other reported VJFET technologies because (a) it eliminates the need for epitaxial regrowth in middle of the device fabrication (2-5), (b) only one mask requires critical alignment throughout device fabrication, and (c) it provides intrinsically a much lower specific on-resistance due to the elimination of internal lateral JFET gates. Successful applications of the technologies to the development of single-cell TI-VJFETs with power level of 6A -1,000V are reported." @default.
- W2006125185 created "2016-06-24" @default.
- W2006125185 creator A5017437296 @default.
- W2006125185 creator A5032102087 @default.
- W2006125185 creator A5041464833 @default.
- W2006125185 creator A5046901051 @default.
- W2006125185 creator A5047843181 @default.
- W2006125185 creator A5085065021 @default.
- W2006125185 date "2004-06-01" @default.
- W2006125185 modified "2023-09-26" @default.
- W2006125185 title "6A, 1kV 4H-SiC Normally-Off Trenched-and-Implanted Vertical JFETs" @default.
- W2006125185 cites W1481847159 @default.
- W2006125185 cites W2007002473 @default.
- W2006125185 cites W2035001258 @default.
- W2006125185 cites W2111495439 @default.
- W2006125185 cites W2131966754 @default.
- W2006125185 doi "https://doi.org/10.4028/www.scientific.net/msf.457-460.1213" @default.
- W2006125185 hasPublicationYear "2004" @default.
- W2006125185 type Work @default.
- W2006125185 sameAs 2006125185 @default.
- W2006125185 citedByCount "4" @default.
- W2006125185 countsByYear W20061251852013 @default.
- W2006125185 crossrefType "journal-article" @default.
- W2006125185 hasAuthorship W2006125185A5017437296 @default.
- W2006125185 hasAuthorship W2006125185A5032102087 @default.
- W2006125185 hasAuthorship W2006125185A5041464833 @default.
- W2006125185 hasAuthorship W2006125185A5046901051 @default.
- W2006125185 hasAuthorship W2006125185A5047843181 @default.
- W2006125185 hasAuthorship W2006125185A5085065021 @default.
- W2006125185 hasConcept C159985019 @default.
- W2006125185 hasConcept C192562407 @default.
- W2006125185 hasConcept C2780722187 @default.
- W2006125185 hasConcept C49040817 @default.
- W2006125185 hasConceptScore W2006125185C159985019 @default.
- W2006125185 hasConceptScore W2006125185C192562407 @default.
- W2006125185 hasConceptScore W2006125185C2780722187 @default.
- W2006125185 hasConceptScore W2006125185C49040817 @default.
- W2006125185 hasLocation W20061251851 @default.
- W2006125185 hasOpenAccess W2006125185 @default.
- W2006125185 hasPrimaryLocation W20061251851 @default.
- W2006125185 hasRelatedWork W1015075493 @default.
- W2006125185 hasRelatedWork W1567094779 @default.
- W2006125185 hasRelatedWork W1828979328 @default.
- W2006125185 hasRelatedWork W1995127628 @default.
- W2006125185 hasRelatedWork W2003727194 @default.
- W2006125185 hasRelatedWork W2012686915 @default.
- W2006125185 hasRelatedWork W2359558263 @default.
- W2006125185 hasRelatedWork W2366379654 @default.
- W2006125185 hasRelatedWork W4237595100 @default.
- W2006125185 hasRelatedWork W4309582254 @default.
- W2006125185 hasVolume "457-460" @default.
- W2006125185 isParatext "false" @default.
- W2006125185 isRetracted "false" @default.
- W2006125185 magId "2006125185" @default.
- W2006125185 workType "article" @default.