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- W2006150698 endingPage "6035" @default.
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- W2006150698 abstract "Using electron beam excited plasma chemical vapor deposition, nanocrystalline Si films can be grown without H 2 dilution. This paper describes the effects of growth parameters on the growth rate and the crystallinity of Si films." @default.
- W2006150698 created "2016-06-24" @default.
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- W2006150698 date "2000-10-01" @default.
- W2006150698 modified "2023-10-16" @default.
- W2006150698 title "Growth Rate and Crystallinity of Nanocrystalline Silicon Film Grown by Electron Beam Excited Plasma Chemical Vapor Deposition" @default.
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- W2006150698 doi "https://doi.org/10.1143/jjap.39.6035" @default.
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