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- W2006190036 endingPage "532" @default.
- W2006190036 startingPage "528" @default.
- W2006190036 abstract "It is shown that continuous or intermittent ion bombardment during deposition can change the growth mode of thick deposits formed by sputtering or evaporation. The columnar morphology commonly found when deposits exceed 1 μ in thickness can be disrupted and the deposit densified by negatively biasing the deposit and subjecting it to ion bombardment during growth. This effect is found to occur in a number of metal systems and may be attributed to resputtering during growth. In the case of sputter deposited tantalum, the density of 6-μ thick films can be increased from 14 g/cm3 at 0 deposit bias to 16.3 g/cm3 at −500-V bias. The macroscopic stress in the deposited film is also shown to be a function of the deposit bias. It is proposed that this growth habit modification may also be obtained in sputter deposited nonmetallic materials and chemical vapor deposits by ion bombarding the deposit during growth." @default.
- W2006190036 created "2016-06-24" @default.
- W2006190036 creator A5036146082 @default.
- W2006190036 creator A5039992334 @default.
- W2006190036 date "1972-01-01" @default.
- W2006190036 modified "2023-10-18" @default.
- W2006190036 title "Structure Modification by Ion Bombardment during Deposition" @default.
- W2006190036 doi "https://doi.org/10.1116/1.1316677" @default.
- W2006190036 hasPublicationYear "1972" @default.
- W2006190036 type Work @default.
- W2006190036 sameAs 2006190036 @default.
- W2006190036 citedByCount "154" @default.
- W2006190036 countsByYear W20061900362012 @default.
- W2006190036 countsByYear W20061900362013 @default.
- W2006190036 countsByYear W20061900362014 @default.
- W2006190036 countsByYear W20061900362015 @default.
- W2006190036 countsByYear W20061900362016 @default.
- W2006190036 countsByYear W20061900362017 @default.
- W2006190036 countsByYear W20061900362018 @default.
- W2006190036 countsByYear W20061900362019 @default.
- W2006190036 countsByYear W20061900362020 @default.
- W2006190036 countsByYear W20061900362021 @default.
- W2006190036 countsByYear W20061900362022 @default.
- W2006190036 countsByYear W20061900362023 @default.
- W2006190036 crossrefType "journal-article" @default.
- W2006190036 hasAuthorship W2006190036A5036146082 @default.
- W2006190036 hasAuthorship W2006190036A5039992334 @default.
- W2006190036 hasConcept C113196181 @default.
- W2006190036 hasConcept C121332964 @default.
- W2006190036 hasConcept C127313418 @default.
- W2006190036 hasConcept C145148216 @default.
- W2006190036 hasConcept C151730666 @default.
- W2006190036 hasConcept C165801399 @default.
- W2006190036 hasConcept C171250308 @default.
- W2006190036 hasConcept C178790620 @default.
- W2006190036 hasConcept C185592680 @default.
- W2006190036 hasConcept C19067145 @default.
- W2006190036 hasConcept C191897082 @default.
- W2006190036 hasConcept C192562407 @default.
- W2006190036 hasConcept C20254490 @default.
- W2006190036 hasConcept C22423302 @default.
- W2006190036 hasConcept C2816523 @default.
- W2006190036 hasConcept C43617362 @default.
- W2006190036 hasConcept C514619126 @default.
- W2006190036 hasConcept C57410435 @default.
- W2006190036 hasConcept C61427134 @default.
- W2006190036 hasConcept C61441594 @default.
- W2006190036 hasConcept C62520636 @default.
- W2006190036 hasConcept C64297162 @default.
- W2006190036 hasConcept C97355855 @default.
- W2006190036 hasConceptScore W2006190036C113196181 @default.
- W2006190036 hasConceptScore W2006190036C121332964 @default.
- W2006190036 hasConceptScore W2006190036C127313418 @default.
- W2006190036 hasConceptScore W2006190036C145148216 @default.
- W2006190036 hasConceptScore W2006190036C151730666 @default.
- W2006190036 hasConceptScore W2006190036C165801399 @default.
- W2006190036 hasConceptScore W2006190036C171250308 @default.
- W2006190036 hasConceptScore W2006190036C178790620 @default.
- W2006190036 hasConceptScore W2006190036C185592680 @default.
- W2006190036 hasConceptScore W2006190036C19067145 @default.
- W2006190036 hasConceptScore W2006190036C191897082 @default.
- W2006190036 hasConceptScore W2006190036C192562407 @default.
- W2006190036 hasConceptScore W2006190036C20254490 @default.
- W2006190036 hasConceptScore W2006190036C22423302 @default.
- W2006190036 hasConceptScore W2006190036C2816523 @default.
- W2006190036 hasConceptScore W2006190036C43617362 @default.
- W2006190036 hasConceptScore W2006190036C514619126 @default.
- W2006190036 hasConceptScore W2006190036C57410435 @default.
- W2006190036 hasConceptScore W2006190036C61427134 @default.
- W2006190036 hasConceptScore W2006190036C61441594 @default.
- W2006190036 hasConceptScore W2006190036C62520636 @default.
- W2006190036 hasConceptScore W2006190036C64297162 @default.
- W2006190036 hasConceptScore W2006190036C97355855 @default.
- W2006190036 hasIssue "1" @default.
- W2006190036 hasLocation W20061900361 @default.
- W2006190036 hasOpenAccess W2006190036 @default.
- W2006190036 hasPrimaryLocation W20061900361 @default.
- W2006190036 hasRelatedWork W1968373997 @default.
- W2006190036 hasRelatedWork W2000616555 @default.
- W2006190036 hasRelatedWork W2004836583 @default.
- W2006190036 hasRelatedWork W2051450443 @default.
- W2006190036 hasRelatedWork W2052352968 @default.
- W2006190036 hasRelatedWork W2086744665 @default.
- W2006190036 hasRelatedWork W2138375871 @default.
- W2006190036 hasRelatedWork W2155077244 @default.
- W2006190036 hasRelatedWork W2363555167 @default.
- W2006190036 hasRelatedWork W2367592328 @default.
- W2006190036 hasVolume "9" @default.
- W2006190036 isParatext "false" @default.
- W2006190036 isRetracted "false" @default.
- W2006190036 magId "2006190036" @default.
- W2006190036 workType "article" @default.