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• W2006290209 endingPage "260" @default.
• W2006290209 startingPage "253" @default.
• W2006290209 abstract "RF excited gas discharges of hexamethyldisiloxane (HMDSO) with and without oxygen and methane (CH4) without further carrier gas were examined to identify reaction parameters determining deposition rate and film properties of SiOx and a-C:H films, respectively. This evaluation is supported by the used reactor type which enables well-defined deposition conditions. Both symmetrical and asymmetrical electrode configurations are investigated. It is found that the deposition rate depends on the reaction parameter power input per gas flow where the gas flows of monomer and reactive carrier gases are added. Thus, O2 in conjunction with HMDSO can be considered as a film-forming gas. Even in asymmetrical discharges the concept of the reaction parameter W/F holds, as long as the increasing ion bombardment allows a continuous film growth. While W/F controls the chemical composition of the films, the potential drop across the plasma sheath influences the mechanical film properties. With these findings SiOx and a-C:H plasma coatings can be designed." @default.
• W2006290209 created "2016-06-24" @default.
• W2006290209 creator A5002958420 @default.
• W2006290209 creator A5028194886 @default.
• W2006290209 creator A5029110111 @default.
• W2006290209 date "2003-09-01" @default.
• W2006290209 modified "2023-09-27" @default.
• W2006290209 title "Evaluation of deposition conditions to design plasma coatings like SiOx and a-C:H on polymers" @default.
• W2006290209 cites W1971338170 @default.
• W2006290209 cites W1977155142 @default.
• W2006290209 cites W1985653233 @default.
• W2006290209 cites W1991979131 @default.
• W2006290209 cites W1998942192 @default.
• W2006290209 cites W2003533813 @default.
• W2006290209 cites W2018972210 @default.
• W2006290209 cites W2019152058 @default.
• W2006290209 cites W2026923555 @default.
• W2006290209 cites W2027109684 @default.
• W2006290209 cites W2030113733 @default.
• W2006290209 cites W2035750585 @default.
• W2006290209 cites W2036457633 @default.
• W2006290209 cites W2050487586 @default.
• W2006290209 cites W2054335200 @default.
• W2006290209 cites W2064545107 @default.
• W2006290209 cites W2067255552 @default.
• W2006290209 cites W2073606437 @default.
• W2006290209 cites W2087945626 @default.
• W2006290209 cites W2112636530 @default.
• W2006290209 cites W211625544 @default.
• W2006290209 cites W27736698 @default.
• W2006290209 doi "https://doi.org/10.1016/s0257-8972(03)00444-4" @default.
• W2006290209 hasPublicationYear "2003" @default.
• W2006290209 type Work @default.
• W2006290209 sameAs 2006290209 @default.
• W2006290209 citedByCount "48" @default.
• W2006290209 countsByYear W20062902092012 @default.
• W2006290209 countsByYear W20062902092013 @default.
• W2006290209 countsByYear W20062902092014 @default.
• W2006290209 countsByYear W20062902092015 @default.
• W2006290209 countsByYear W20062902092016 @default.
• W2006290209 countsByYear W20062902092017 @default.
• W2006290209 countsByYear W20062902092018 @default.
• W2006290209 countsByYear W20062902092019 @default.
• W2006290209 countsByYear W20062902092020 @default.
• W2006290209 countsByYear W20062902092021 @default.
• W2006290209 countsByYear W20062902092022 @default.
• W2006290209 crossrefType "journal-article" @default.
• W2006290209 hasAuthorship W2006290209A5002958420 @default.
• W2006290209 hasAuthorship W2006290209A5028194886 @default.
• W2006290209 hasAuthorship W2006290209A5029110111 @default.
• W2006290209 hasConcept C113196181 @default.
• W2006290209 hasConcept C118442862 @default.
• W2006290209 hasConcept C121332964 @default.
• W2006290209 hasConcept C127413603 @default.
• W2006290209 hasConcept C147789679 @default.
• W2006290209 hasConcept C151730666 @default.
• W2006290209 hasConcept C159985019 @default.
• W2006290209 hasConcept C171250308 @default.
• W2006290209 hasConcept C172120300 @default.
• W2006290209 hasConcept C17525397 @default.
• W2006290209 hasConcept C175721412 @default.
• W2006290209 hasConcept C178790620 @default.
• W2006290209 hasConcept C185592680 @default.
• W2006290209 hasConcept C19067145 @default.
• W2006290209 hasConcept C192562407 @default.
• W2006290209 hasConcept C22423302 @default.
• W2006290209 hasConcept C2776551725 @default.
• W2006290209 hasConcept C2781345722 @default.
• W2006290209 hasConcept C2816523 @default.
• W2006290209 hasConcept C38347018 @default.
• W2006290209 hasConcept C41008148 @default.
• W2006290209 hasConcept C42360764 @default.
• W2006290209 hasConcept C516920438 @default.
• W2006290209 hasConcept C521977710 @default.
• W2006290209 hasConcept C540031477 @default.
• W2006290209 hasConcept C62520636 @default.
• W2006290209 hasConcept C64297162 @default.
• W2006290209 hasConcept C76155785 @default.
• W2006290209 hasConcept C82706917 @default.
• W2006290209 hasConcept C86803240 @default.
• W2006290209 hasConcept C97355855 @default.
• W2006290209 hasConceptScore W2006290209C113196181 @default.
• W2006290209 hasConceptScore W2006290209C118442862 @default.
• W2006290209 hasConceptScore W2006290209C121332964 @default.
• W2006290209 hasConceptScore W2006290209C127413603 @default.
• W2006290209 hasConceptScore W2006290209C147789679 @default.
• W2006290209 hasConceptScore W2006290209C151730666 @default.
• W2006290209 hasConceptScore W2006290209C159985019 @default.
• W2006290209 hasConceptScore W2006290209C171250308 @default.
• W2006290209 hasConceptScore W2006290209C172120300 @default.
• W2006290209 hasConceptScore W2006290209C17525397 @default.
• W2006290209 hasConceptScore W2006290209C175721412 @default.
• W2006290209 hasConceptScore W2006290209C178790620 @default.
• W2006290209 hasConceptScore W2006290209C185592680 @default.
• W2006290209 hasConceptScore W2006290209C19067145 @default.
• W2006290209 hasConceptScore W2006290209C192562407 @default.
• W2006290209 hasConceptScore W2006290209C22423302 @default.
• W2006290209 hasConceptScore W2006290209C2776551725 @default.

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