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- W2006372435 abstract "Thus, submicron electron-beam diagnostics calls for construction of physical and mathematical models of signal generation, on the one hand, and development of efficient signal processing techniques, on the other hand. Mathematical simulation is one of the most essential means of solving these problems. The paper reports the results of application of the mathematical simulation method to solving the two problems of scanning electron microscopy. The possibility of its employment in submicron diagnostics is considered." @default.
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- W2006372435 date "1987-01-01" @default.
- W2006372435 modified "2023-09-24" @default.
- W2006372435 title "Prospects of application of mathematical simulation in scanning electron microscopy" @default.
- W2006372435 doi "https://doi.org/10.1109/nascod.1987.721129" @default.
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