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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006398420> ?p ?o ?g. }

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• W2006398420 abstract "We present recent work in which direct-write electron-beam lithography has been used to fabricate near-field optical, thermal and magnetic sensors. Key fabrication issues affecting the performance of these probes are discussed and recent fabrication results are presented." @default.
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• W2006398420 date "1999-07-01" @default.
• W2006398420 modified "2023-10-09" @default.
• W2006398420 title "Recent progress in the functionalization of atomic force microscope probes using electron-beam nanolithography" @default.
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• W2006398420 doi "https://doi.org/10.1116/1.581753" @default.
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