Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006400514> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W2006400514 endingPage "2425" @default.
- W2006400514 startingPage "2425" @default.
- W2006400514 abstract "A new method to obtain clean silicon surfaces using a thermal treatment at as low as 700°C is proposed. The method consists of an ex situ treatment of HF dipping followed by a rinse in distilled, deionized water and in situ treatments of both UVOC under low oxygen pressure and annealing in vacuo. From the Arrhenius plot of the removal rate of the surface oxide, two mechanisms corresponding to a diffusion of the volatile product, SiO, and a reaction between oxygen and silicon are suggested to exist, with activation energies 3.7 eV and 1.9 eV, respectively." @default.
- W2006400514 created "2016-06-24" @default.
- W2006400514 creator A5008787833 @default.
- W2006400514 creator A5038784810 @default.
- W2006400514 creator A5060820670 @default.
- W2006400514 date "1989-12-01" @default.
- W2006400514 modified "2023-10-14" @default.
- W2006400514 title "Low Temperature Silicon Surface Cleaning by HF Etching/Ultraviolet Ozone Cleaning (HF/UVOC) Method (II)–in situ UVOC" @default.
- W2006400514 cites W1991401244 @default.
- W2006400514 cites W2004836811 @default.
- W2006400514 cites W2004956765 @default.
- W2006400514 cites W2005795605 @default.
- W2006400514 cites W2013746255 @default.
- W2006400514 cites W2042469719 @default.
- W2006400514 cites W2045142560 @default.
- W2006400514 doi "https://doi.org/10.1143/jjap.28.2425" @default.
- W2006400514 hasPublicationYear "1989" @default.
- W2006400514 type Work @default.
- W2006400514 sameAs 2006400514 @default.
- W2006400514 citedByCount "27" @default.
- W2006400514 countsByYear W20064005142015 @default.
- W2006400514 countsByYear W20064005142018 @default.
- W2006400514 countsByYear W20064005142019 @default.
- W2006400514 crossrefType "journal-article" @default.
- W2006400514 hasAuthorship W2006400514A5008787833 @default.
- W2006400514 hasAuthorship W2006400514A5038784810 @default.
- W2006400514 hasAuthorship W2006400514A5060820670 @default.
- W2006400514 hasConcept C100460472 @default.
- W2006400514 hasConcept C107872376 @default.
- W2006400514 hasConcept C113196181 @default.
- W2006400514 hasConcept C147789679 @default.
- W2006400514 hasConcept C171250308 @default.
- W2006400514 hasConcept C178790620 @default.
- W2006400514 hasConcept C185592680 @default.
- W2006400514 hasConcept C191897082 @default.
- W2006400514 hasConcept C192562407 @default.
- W2006400514 hasConcept C2776798109 @default.
- W2006400514 hasConcept C2777431650 @default.
- W2006400514 hasConcept C2777822432 @default.
- W2006400514 hasConcept C2777855556 @default.
- W2006400514 hasConcept C2779105228 @default.
- W2006400514 hasConcept C2779227376 @default.
- W2006400514 hasConcept C2779429693 @default.
- W2006400514 hasConcept C2779851234 @default.
- W2006400514 hasConcept C43617362 @default.
- W2006400514 hasConcept C49040817 @default.
- W2006400514 hasConcept C508106653 @default.
- W2006400514 hasConcept C540031477 @default.
- W2006400514 hasConcept C544956773 @default.
- W2006400514 hasConcept C86183883 @default.
- W2006400514 hasConcept C95121573 @default.
- W2006400514 hasConceptScore W2006400514C100460472 @default.
- W2006400514 hasConceptScore W2006400514C107872376 @default.
- W2006400514 hasConceptScore W2006400514C113196181 @default.
- W2006400514 hasConceptScore W2006400514C147789679 @default.
- W2006400514 hasConceptScore W2006400514C171250308 @default.
- W2006400514 hasConceptScore W2006400514C178790620 @default.
- W2006400514 hasConceptScore W2006400514C185592680 @default.
- W2006400514 hasConceptScore W2006400514C191897082 @default.
- W2006400514 hasConceptScore W2006400514C192562407 @default.
- W2006400514 hasConceptScore W2006400514C2776798109 @default.
- W2006400514 hasConceptScore W2006400514C2777431650 @default.
- W2006400514 hasConceptScore W2006400514C2777822432 @default.
- W2006400514 hasConceptScore W2006400514C2777855556 @default.
- W2006400514 hasConceptScore W2006400514C2779105228 @default.
- W2006400514 hasConceptScore W2006400514C2779227376 @default.
- W2006400514 hasConceptScore W2006400514C2779429693 @default.
- W2006400514 hasConceptScore W2006400514C2779851234 @default.
- W2006400514 hasConceptScore W2006400514C43617362 @default.
- W2006400514 hasConceptScore W2006400514C49040817 @default.
- W2006400514 hasConceptScore W2006400514C508106653 @default.
- W2006400514 hasConceptScore W2006400514C540031477 @default.
- W2006400514 hasConceptScore W2006400514C544956773 @default.
- W2006400514 hasConceptScore W2006400514C86183883 @default.
- W2006400514 hasConceptScore W2006400514C95121573 @default.
- W2006400514 hasIssue "12R" @default.
- W2006400514 hasLocation W20064005141 @default.
- W2006400514 hasOpenAccess W2006400514 @default.
- W2006400514 hasPrimaryLocation W20064005141 @default.
- W2006400514 hasRelatedWork W158851525 @default.
- W2006400514 hasRelatedWork W1976189486 @default.
- W2006400514 hasRelatedWork W2045240273 @default.
- W2006400514 hasRelatedWork W2358476386 @default.
- W2006400514 hasRelatedWork W2379416027 @default.
- W2006400514 hasRelatedWork W2391372203 @default.
- W2006400514 hasRelatedWork W3204621157 @default.
- W2006400514 hasRelatedWork W4362700434 @default.
- W2006400514 hasRelatedWork W4386761272 @default.
- W2006400514 hasRelatedWork W2185562424 @default.
- W2006400514 hasVolume "28" @default.
- W2006400514 isParatext "false" @default.
- W2006400514 isRetracted "false" @default.
- W2006400514 magId "2006400514" @default.
- W2006400514 workType "article" @default.