Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006415196> ?p ?o ?g. }
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- W2006415196 endingPage "012048" @default.
- W2006415196 startingPage "012048" @default.
- W2006415196 abstract "A novel, relatively simple and cost effective method is reported to fabricate suspended silicon nanowires. This method allows for the production of suspended silicon nanowires using anisotropic wet etching and thermal oxidation of single crystalline silicon. The dimensions of the silicon nanowires fabricated with the proposed method are evaluated. The vibration properties of the nanowires obtained by heterodyne laser doppler interferometer show the potential of being nanomechanical sensors." @default.
- W2006415196 created "2016-06-24" @default.
- W2006415196 creator A5053142045 @default.
- W2006415196 creator A5054849616 @default.
- W2006415196 creator A5077088538 @default.
- W2006415196 creator A5078547919 @default.
- W2006415196 creator A5087227023 @default.
- W2006415196 creator A5091040354 @default.
- W2006415196 date "2009-03-01" @default.
- W2006415196 modified "2023-09-30" @default.
- W2006415196 title "Simple fabrication of Si nanowire and its biological application" @default.
- W2006415196 cites W1987416224 @default.
- W2006415196 cites W1991330407 @default.
- W2006415196 cites W2008753186 @default.
- W2006415196 cites W2037520542 @default.
- W2006415196 cites W2047507725 @default.
- W2006415196 cites W2064484067 @default.
- W2006415196 cites W2077609143 @default.
- W2006415196 cites W2088915729 @default.
- W2006415196 cites W2091129424 @default.
- W2006415196 cites W2091166549 @default.
- W2006415196 cites W2130686586 @default.
- W2006415196 cites W2158912158 @default.
- W2006415196 cites W2171158267 @default.
- W2006415196 doi "https://doi.org/10.1088/1742-6596/152/1/012048" @default.
- W2006415196 hasPublicationYear "2009" @default.
- W2006415196 type Work @default.
- W2006415196 sameAs 2006415196 @default.
- W2006415196 citedByCount "3" @default.
- W2006415196 countsByYear W20064151962015 @default.
- W2006415196 countsByYear W20064151962016 @default.
- W2006415196 crossrefType "journal-article" @default.
- W2006415196 hasAuthorship W2006415196A5053142045 @default.
- W2006415196 hasAuthorship W2006415196A5054849616 @default.
- W2006415196 hasAuthorship W2006415196A5077088538 @default.
- W2006415196 hasAuthorship W2006415196A5078547919 @default.
- W2006415196 hasAuthorship W2006415196A5087227023 @default.
- W2006415196 hasAuthorship W2006415196A5091040354 @default.
- W2006415196 hasConcept C100460472 @default.
- W2006415196 hasConcept C121332964 @default.
- W2006415196 hasConcept C136525101 @default.
- W2006415196 hasConcept C139159486 @default.
- W2006415196 hasConcept C142724271 @default.
- W2006415196 hasConcept C160671074 @default.
- W2006415196 hasConcept C171250308 @default.
- W2006415196 hasConcept C192562407 @default.
- W2006415196 hasConcept C204787440 @default.
- W2006415196 hasConcept C24890656 @default.
- W2006415196 hasConcept C2779227376 @default.
- W2006415196 hasConcept C2779281663 @default.
- W2006415196 hasConcept C2780497637 @default.
- W2006415196 hasConcept C2986665194 @default.
- W2006415196 hasConcept C49040817 @default.
- W2006415196 hasConcept C544956773 @default.
- W2006415196 hasConcept C71924100 @default.
- W2006415196 hasConcept C74214498 @default.
- W2006415196 hasConceptScore W2006415196C100460472 @default.
- W2006415196 hasConceptScore W2006415196C121332964 @default.
- W2006415196 hasConceptScore W2006415196C136525101 @default.
- W2006415196 hasConceptScore W2006415196C139159486 @default.
- W2006415196 hasConceptScore W2006415196C142724271 @default.
- W2006415196 hasConceptScore W2006415196C160671074 @default.
- W2006415196 hasConceptScore W2006415196C171250308 @default.
- W2006415196 hasConceptScore W2006415196C192562407 @default.
- W2006415196 hasConceptScore W2006415196C204787440 @default.
- W2006415196 hasConceptScore W2006415196C24890656 @default.
- W2006415196 hasConceptScore W2006415196C2779227376 @default.
- W2006415196 hasConceptScore W2006415196C2779281663 @default.
- W2006415196 hasConceptScore W2006415196C2780497637 @default.
- W2006415196 hasConceptScore W2006415196C2986665194 @default.
- W2006415196 hasConceptScore W2006415196C49040817 @default.
- W2006415196 hasConceptScore W2006415196C544956773 @default.
- W2006415196 hasConceptScore W2006415196C71924100 @default.
- W2006415196 hasConceptScore W2006415196C74214498 @default.
- W2006415196 hasLocation W20064151961 @default.
- W2006415196 hasOpenAccess W2006415196 @default.
- W2006415196 hasPrimaryLocation W20064151961 @default.
- W2006415196 hasRelatedWork W1963887037 @default.
- W2006415196 hasRelatedWork W1984409202 @default.
- W2006415196 hasRelatedWork W1990325953 @default.
- W2006415196 hasRelatedWork W2004146770 @default.
- W2006415196 hasRelatedWork W2006415196 @default.
- W2006415196 hasRelatedWork W2038649170 @default.
- W2006415196 hasRelatedWork W2054385866 @default.
- W2006415196 hasRelatedWork W2135105628 @default.
- W2006415196 hasRelatedWork W2389949269 @default.
- W2006415196 hasRelatedWork W2889026140 @default.
- W2006415196 hasVolume "152" @default.
- W2006415196 isParatext "false" @default.
- W2006415196 isRetracted "false" @default.
- W2006415196 magId "2006415196" @default.
- W2006415196 workType "article" @default.