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• W2006553342 abstract "The ablation behavior of single crystalline sapphire with nanosecond laser pulses at 157 nm wavelength is investigated. Ablation rates of about 10 to 100 nm/pulse are obtained at fluences ranging from 1 to 9 J/cm2. At moderate fluences, incubation behavior is observed, i.e. ablation starts after material modification by a number of laser pulses. The ablation can be utilized to fabricate sapphire micro-optics. The capability of creating lenses or gratings on the tip of sapphire fibers is demonstrated. Multilevel diffractive optical elements and high resolution gratings with 1 μm period are fabricated on planar sapphire substrates." @default.
• W2006553342 created "2016-06-24" @default.
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• W2006553342 date "2011-03-03" @default.
• W2006553342 modified "2023-09-23" @default.
• W2006553342 title "High resolution patterning of sapphire by F2-laser ablation" @default.
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• W2006553342 doi "https://doi.org/10.1007/s00339-011-6347-7" @default.
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