Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006688100> ?p ?o ?g. }
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with 100 items per page.
- W2006688100 endingPage "73" @default.
- W2006688100 startingPage "66" @default.
- W2006688100 abstract "This paper presents in-situ measurement results for energy and environmental performance of 13 cleanroom systems located in the United States, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with IEST Recommended Practice IEST-RP-CC012.1: Considerations in Cleanroom Design are made to examine the performance of cleanroom air systems. Based on the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance." @default.
- W2006688100 created "2016-06-24" @default.
- W2006688100 creator A5015179849 @default.
- W2006688100 date "2003-09-14" @default.
- W2006688100 modified "2023-09-27" @default.
- W2006688100 title "Performance Evaluation of Cleanroom Environmental Systems" @default.
- W2006688100 cites W1496565978 @default.
- W2006688100 doi "https://doi.org/10.17764/jiet.46.1.326183248n101567" @default.
- W2006688100 hasPublicationYear "2003" @default.
- W2006688100 type Work @default.
- W2006688100 sameAs 2006688100 @default.
- W2006688100 citedByCount "16" @default.
- W2006688100 countsByYear W20066881002012 @default.
- W2006688100 countsByYear W20066881002015 @default.
- W2006688100 countsByYear W20066881002021 @default.
- W2006688100 countsByYear W20066881002022 @default.
- W2006688100 crossrefType "journal-article" @default.
- W2006688100 hasAuthorship W2006688100A5015179849 @default.
- W2006688100 hasBestOaLocation W20066881003 @default.
- W2006688100 hasConcept C112570922 @default.
- W2006688100 hasConcept C119599485 @default.
- W2006688100 hasConcept C127094628 @default.
- W2006688100 hasConcept C127413603 @default.
- W2006688100 hasConcept C144133560 @default.
- W2006688100 hasConcept C162853370 @default.
- W2006688100 hasConcept C171250308 @default.
- W2006688100 hasConcept C18903297 @default.
- W2006688100 hasConcept C192562407 @default.
- W2006688100 hasConcept C201995342 @default.
- W2006688100 hasConcept C2742236 @default.
- W2006688100 hasConcept C86251818 @default.
- W2006688100 hasConcept C86803240 @default.
- W2006688100 hasConcept C93497512 @default.
- W2006688100 hasConceptScore W2006688100C112570922 @default.
- W2006688100 hasConceptScore W2006688100C119599485 @default.
- W2006688100 hasConceptScore W2006688100C127094628 @default.
- W2006688100 hasConceptScore W2006688100C127413603 @default.
- W2006688100 hasConceptScore W2006688100C144133560 @default.
- W2006688100 hasConceptScore W2006688100C162853370 @default.
- W2006688100 hasConceptScore W2006688100C171250308 @default.
- W2006688100 hasConceptScore W2006688100C18903297 @default.
- W2006688100 hasConceptScore W2006688100C192562407 @default.
- W2006688100 hasConceptScore W2006688100C201995342 @default.
- W2006688100 hasConceptScore W2006688100C2742236 @default.
- W2006688100 hasConceptScore W2006688100C86251818 @default.
- W2006688100 hasConceptScore W2006688100C86803240 @default.
- W2006688100 hasConceptScore W2006688100C93497512 @default.
- W2006688100 hasIssue "1" @default.
- W2006688100 hasLocation W20066881001 @default.
- W2006688100 hasLocation W20066881002 @default.
- W2006688100 hasLocation W20066881003 @default.
- W2006688100 hasLocation W20066881004 @default.
- W2006688100 hasOpenAccess W2006688100 @default.
- W2006688100 hasPrimaryLocation W20066881001 @default.
- W2006688100 hasRelatedWork W1973649185 @default.
- W2006688100 hasRelatedWork W2033808016 @default.
- W2006688100 hasRelatedWork W2128344566 @default.
- W2006688100 hasRelatedWork W2169285313 @default.
- W2006688100 hasRelatedWork W2183657198 @default.
- W2006688100 hasRelatedWork W2584359409 @default.
- W2006688100 hasRelatedWork W4240541385 @default.
- W2006688100 hasRelatedWork W4294354417 @default.
- W2006688100 hasRelatedWork W4298129405 @default.
- W2006688100 hasRelatedWork W593683615 @default.
- W2006688100 hasVolume "46" @default.
- W2006688100 isParatext "false" @default.
- W2006688100 isRetracted "false" @default.
- W2006688100 magId "2006688100" @default.
- W2006688100 workType "article" @default.