Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006697557> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2006697557 endingPage "6882" @default.
- W2006697557 startingPage "6882" @default.
- W2006697557 abstract "Vacuum-ultraviolet (VUV) light induced etching of thermally grown silicon dioxide films was investigated near room temperature. We used synchrotron radiation as a VUV light source and anhydrous-hydrogen-fluoride as an etching gas. The silicon dioxide is etched only in the VUV light irradiated area, and etched selectively with respect to (100) oriented singlecrystalline silicon, which is not etched even under the irradiation. Moreover, we have found anisotropic etching with the patterned polycrystalline silicon etching mask. The ratio of the etch rate of SiO 2 in the vertical direction compared to the horizontal direction of the substrate surface is about 30. From these results, the etching process is due to the photo-induced surface reaction. The excitation of the adsorbed AHF molecules or SiO 2 surface would be a dominant process." @default.
- W2006697557 created "2016-06-24" @default.
- W2006697557 creator A5012679973 @default.
- W2006697557 creator A5031904423 @default.
- W2006697557 creator A5051780556 @default.
- W2006697557 creator A5071094160 @default.
- W2006697557 date "1995-12-01" @default.
- W2006697557 modified "2023-09-23" @default.
- W2006697557 title "Effects of Vacuum-Ultraviolet-Light-Induced Surface Reaction on Selective and Anisotropic Etching of Silicon Dioxide Using Anhydrous Hydrogen Fluoride Gas" @default.
- W2006697557 cites W1975042607 @default.
- W2006697557 cites W2001076523 @default.
- W2006697557 cites W2012043909 @default.
- W2006697557 cites W2040418220 @default.
- W2006697557 cites W2048841751 @default.
- W2006697557 cites W2054694108 @default.
- W2006697557 cites W2072769438 @default.
- W2006697557 cites W2090438710 @default.
- W2006697557 cites W2097622905 @default.
- W2006697557 doi "https://doi.org/10.1143/jjap.34.6882" @default.
- W2006697557 hasPublicationYear "1995" @default.
- W2006697557 type Work @default.
- W2006697557 sameAs 2006697557 @default.
- W2006697557 citedByCount "3" @default.
- W2006697557 crossrefType "journal-article" @default.
- W2006697557 hasAuthorship W2006697557A5012679973 @default.
- W2006697557 hasAuthorship W2006697557A5031904423 @default.
- W2006697557 hasAuthorship W2006697557A5051780556 @default.
- W2006697557 hasAuthorship W2006697557A5071094160 @default.
- W2006697557 hasConcept C100460472 @default.
- W2006697557 hasConcept C111368507 @default.
- W2006697557 hasConcept C113196181 @default.
- W2006697557 hasConcept C127313418 @default.
- W2006697557 hasConcept C1291036 @default.
- W2006697557 hasConcept C159985019 @default.
- W2006697557 hasConcept C171250308 @default.
- W2006697557 hasConcept C178790620 @default.
- W2006697557 hasConcept C179104552 @default.
- W2006697557 hasConcept C185592680 @default.
- W2006697557 hasConcept C187714232 @default.
- W2006697557 hasConcept C192562407 @default.
- W2006697557 hasConcept C2776641247 @default.
- W2006697557 hasConcept C2777289219 @default.
- W2006697557 hasConcept C2779089622 @default.
- W2006697557 hasConcept C2779227376 @default.
- W2006697557 hasConcept C2987116853 @default.
- W2006697557 hasConcept C49040817 @default.
- W2006697557 hasConcept C512968161 @default.
- W2006697557 hasConcept C544956773 @default.
- W2006697557 hasConceptScore W2006697557C100460472 @default.
- W2006697557 hasConceptScore W2006697557C111368507 @default.
- W2006697557 hasConceptScore W2006697557C113196181 @default.
- W2006697557 hasConceptScore W2006697557C127313418 @default.
- W2006697557 hasConceptScore W2006697557C1291036 @default.
- W2006697557 hasConceptScore W2006697557C159985019 @default.
- W2006697557 hasConceptScore W2006697557C171250308 @default.
- W2006697557 hasConceptScore W2006697557C178790620 @default.
- W2006697557 hasConceptScore W2006697557C179104552 @default.
- W2006697557 hasConceptScore W2006697557C185592680 @default.
- W2006697557 hasConceptScore W2006697557C187714232 @default.
- W2006697557 hasConceptScore W2006697557C192562407 @default.
- W2006697557 hasConceptScore W2006697557C2776641247 @default.
- W2006697557 hasConceptScore W2006697557C2777289219 @default.
- W2006697557 hasConceptScore W2006697557C2779089622 @default.
- W2006697557 hasConceptScore W2006697557C2779227376 @default.
- W2006697557 hasConceptScore W2006697557C2987116853 @default.
- W2006697557 hasConceptScore W2006697557C49040817 @default.
- W2006697557 hasConceptScore W2006697557C512968161 @default.
- W2006697557 hasConceptScore W2006697557C544956773 @default.
- W2006697557 hasIssue "12S" @default.
- W2006697557 hasLocation W20066975571 @default.
- W2006697557 hasOpenAccess W2006697557 @default.
- W2006697557 hasPrimaryLocation W20066975571 @default.
- W2006697557 hasRelatedWork W1194555893 @default.
- W2006697557 hasRelatedWork W1968082001 @default.
- W2006697557 hasRelatedWork W1989605686 @default.
- W2006697557 hasRelatedWork W2006697557 @default.
- W2006697557 hasRelatedWork W2013557620 @default.
- W2006697557 hasRelatedWork W2041550169 @default.
- W2006697557 hasRelatedWork W2080508769 @default.
- W2006697557 hasRelatedWork W2081052414 @default.
- W2006697557 hasRelatedWork W2359200086 @default.
- W2006697557 hasRelatedWork W2971572888 @default.
- W2006697557 hasVolume "34" @default.
- W2006697557 isParatext "false" @default.
- W2006697557 isRetracted "false" @default.
- W2006697557 magId "2006697557" @default.
- W2006697557 workType "article" @default.