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- W2006768488 abstract "Lithographic properties of a variety of acetal-derivatized styrene based polymers are reported. The structural modifications in the polymers involve varying the size of the pendent acetal moiety. the lithographic performances of the resists containing structurally modified acetals were found to be superior to the conventional acetals. In the cases where the acidolysis products of the modified acetals are non-volatile alcohols, the post-exposure volatilization, film shrinkage and plasma etch resistance were found to be significantly improved." @default.
- W2006768488 created "2016-06-24" @default.
- W2006768488 creator A5000214180 @default.
- W2006768488 creator A5007069275 @default.
- W2006768488 creator A5012483059 @default.
- W2006768488 creator A5026671987 @default.
- W2006768488 creator A5034129409 @default.
- W2006768488 creator A5045143638 @default.
- W2006768488 creator A5049124583 @default.
- W2006768488 creator A5050124257 @default.
- W2006768488 creator A5054753733 @default.
- W2006768488 creator A5065551284 @default.
- W2006768488 creator A5074877391 @default.
- W2006768488 creator A5079971397 @default.
- W2006768488 creator A5081421002 @default.
- W2006768488 creator A5083586208 @default.
- W2006768488 date "1999-06-11" @default.
- W2006768488 modified "2023-09-23" @default.
- W2006768488 title "Lithographic properties of novel acetal-derivatized hydroxy styrene polymers" @default.
- W2006768488 doi "https://doi.org/10.1117/12.350222" @default.
- W2006768488 hasPublicationYear "1999" @default.
- W2006768488 type Work @default.
- W2006768488 sameAs 2006768488 @default.
- W2006768488 citedByCount "1" @default.
- W2006768488 countsByYear W20067684882014 @default.
- W2006768488 crossrefType "proceedings-article" @default.
- W2006768488 hasAuthorship W2006768488A5000214180 @default.
- W2006768488 hasAuthorship W2006768488A5007069275 @default.
- W2006768488 hasAuthorship W2006768488A5012483059 @default.
- W2006768488 hasAuthorship W2006768488A5026671987 @default.
- W2006768488 hasAuthorship W2006768488A5034129409 @default.
- W2006768488 hasAuthorship W2006768488A5045143638 @default.
- W2006768488 hasAuthorship W2006768488A5049124583 @default.
- W2006768488 hasAuthorship W2006768488A5050124257 @default.
- W2006768488 hasAuthorship W2006768488A5054753733 @default.
- W2006768488 hasAuthorship W2006768488A5065551284 @default.
- W2006768488 hasAuthorship W2006768488A5074877391 @default.
- W2006768488 hasAuthorship W2006768488A5079971397 @default.
- W2006768488 hasAuthorship W2006768488A5081421002 @default.
- W2006768488 hasAuthorship W2006768488A5083586208 @default.
- W2006768488 hasConcept C134406635 @default.
- W2006768488 hasConcept C15920480 @default.
- W2006768488 hasConcept C178790620 @default.
- W2006768488 hasConcept C185592680 @default.
- W2006768488 hasConcept C188027245 @default.
- W2006768488 hasConcept C192562407 @default.
- W2006768488 hasConcept C204223013 @default.
- W2006768488 hasConcept C2776568683 @default.
- W2006768488 hasConcept C2777566558 @default.
- W2006768488 hasConcept C2777731525 @default.
- W2006768488 hasConcept C2779227376 @default.
- W2006768488 hasConcept C49040817 @default.
- W2006768488 hasConcept C521977710 @default.
- W2006768488 hasConcept C53524968 @default.
- W2006768488 hasConceptScore W2006768488C134406635 @default.
- W2006768488 hasConceptScore W2006768488C15920480 @default.
- W2006768488 hasConceptScore W2006768488C178790620 @default.
- W2006768488 hasConceptScore W2006768488C185592680 @default.
- W2006768488 hasConceptScore W2006768488C188027245 @default.
- W2006768488 hasConceptScore W2006768488C192562407 @default.
- W2006768488 hasConceptScore W2006768488C204223013 @default.
- W2006768488 hasConceptScore W2006768488C2776568683 @default.
- W2006768488 hasConceptScore W2006768488C2777566558 @default.
- W2006768488 hasConceptScore W2006768488C2777731525 @default.
- W2006768488 hasConceptScore W2006768488C2779227376 @default.
- W2006768488 hasConceptScore W2006768488C49040817 @default.
- W2006768488 hasConceptScore W2006768488C521977710 @default.
- W2006768488 hasConceptScore W2006768488C53524968 @default.
- W2006768488 hasLocation W20067684881 @default.
- W2006768488 hasOpenAccess W2006768488 @default.
- W2006768488 hasPrimaryLocation W20067684881 @default.
- W2006768488 hasRelatedWork W1569278359 @default.
- W2006768488 hasRelatedWork W1577782092 @default.
- W2006768488 hasRelatedWork W1968222564 @default.
- W2006768488 hasRelatedWork W1998395799 @default.
- W2006768488 hasRelatedWork W2006768488 @default.
- W2006768488 hasRelatedWork W2030479646 @default.
- W2006768488 hasRelatedWork W2043576736 @default.
- W2006768488 hasRelatedWork W2070549203 @default.
- W2006768488 hasRelatedWork W2075188128 @default.
- W2006768488 hasRelatedWork W4281565378 @default.
- W2006768488 isParatext "false" @default.
- W2006768488 isRetracted "false" @default.
- W2006768488 magId "2006768488" @default.
- W2006768488 workType "article" @default.