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- W2006883251 abstract "We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s." @default.
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- W2006883251 date "1989-10-11" @default.
- W2006883251 modified "2023-09-23" @default.
- W2006883251 title "Surface Flatness Measurement System" @default.
- W2006883251 doi "https://doi.org/10.1117/12.955591" @default.
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