Matches in SemOpenAlex for { <https://semopenalex.org/work/W2006943989> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2006943989 endingPage "4682" @default.
- W2006943989 startingPage "4679" @default.
- W2006943989 abstract "We have investigated the redistribution of uniformly doped As atoms (ND=4.0×1019 cm−3) in Si during Pd2Si formation with neutron activation analysis and the influence of the redistribution on contact resistivity. Some of the uniformly doped As atoms are pushed ahead into Si near the silicide–silicon interface during Pd2Si formation at 250 °C. The amount of the redistributed As atoms increases with the thickness of Si consumed and reaches a peak concentration of 2.0×1020 cm−3. Contact resistivity is reduced from the initial values of 3.8×10−5−4.1×10−4 Ω cm2 before silicide formation, to a final value of 1.8×10−6 Ω cm2 after complete reaction. The electrically active As atoms is estimated to be 50% of the total redistributed." @default.
- W2006943989 created "2016-06-24" @default.
- W2006943989 creator A5004405185 @default.
- W2006943989 creator A5004609434 @default.
- W2006943989 creator A5036236481 @default.
- W2006943989 creator A5041622098 @default.
- W2006943989 creator A5059085489 @default.
- W2006943989 creator A5061216998 @default.
- W2006943989 creator A5061885485 @default.
- W2006943989 creator A5062183636 @default.
- W2006943989 creator A5069867157 @default.
- W2006943989 creator A5077493135 @default.
- W2006943989 creator A5090276104 @default.
- W2006943989 date "1983-08-01" @default.
- W2006943989 modified "2023-09-23" @default.
- W2006943989 title "Reduction of contact resistivity by As redistribution during Pd2Si formation" @default.
- W2006943989 cites W1989238041 @default.
- W2006943989 cites W1990144533 @default.
- W2006943989 cites W2011976263 @default.
- W2006943989 cites W2024147860 @default.
- W2006943989 cites W2060347311 @default.
- W2006943989 cites W2064764768 @default.
- W2006943989 cites W2065861346 @default.
- W2006943989 cites W2072306321 @default.
- W2006943989 cites W2072466462 @default.
- W2006943989 cites W2087241604 @default.
- W2006943989 cites W2105496806 @default.
- W2006943989 doi "https://doi.org/10.1063/1.332630" @default.
- W2006943989 hasPublicationYear "1983" @default.
- W2006943989 type Work @default.
- W2006943989 sameAs 2006943989 @default.
- W2006943989 citedByCount "11" @default.
- W2006943989 countsByYear W20069439892013 @default.
- W2006943989 crossrefType "journal-article" @default.
- W2006943989 hasAuthorship W2006943989A5004405185 @default.
- W2006943989 hasAuthorship W2006943989A5004609434 @default.
- W2006943989 hasAuthorship W2006943989A5036236481 @default.
- W2006943989 hasAuthorship W2006943989A5041622098 @default.
- W2006943989 hasAuthorship W2006943989A5059085489 @default.
- W2006943989 hasAuthorship W2006943989A5061216998 @default.
- W2006943989 hasAuthorship W2006943989A5061885485 @default.
- W2006943989 hasAuthorship W2006943989A5062183636 @default.
- W2006943989 hasAuthorship W2006943989A5069867157 @default.
- W2006943989 hasAuthorship W2006943989A5077493135 @default.
- W2006943989 hasAuthorship W2006943989A5090276104 @default.
- W2006943989 hasConcept C113196181 @default.
- W2006943989 hasConcept C121332964 @default.
- W2006943989 hasConcept C17744445 @default.
- W2006943989 hasConcept C185592680 @default.
- W2006943989 hasConcept C191897082 @default.
- W2006943989 hasConcept C192562407 @default.
- W2006943989 hasConcept C199539241 @default.
- W2006943989 hasConcept C2780901251 @default.
- W2006943989 hasConcept C43617362 @default.
- W2006943989 hasConcept C49040817 @default.
- W2006943989 hasConcept C544956773 @default.
- W2006943989 hasConcept C57863236 @default.
- W2006943989 hasConcept C62520636 @default.
- W2006943989 hasConcept C69990965 @default.
- W2006943989 hasConcept C74080474 @default.
- W2006943989 hasConcept C8010536 @default.
- W2006943989 hasConcept C94625758 @default.
- W2006943989 hasConceptScore W2006943989C113196181 @default.
- W2006943989 hasConceptScore W2006943989C121332964 @default.
- W2006943989 hasConceptScore W2006943989C17744445 @default.
- W2006943989 hasConceptScore W2006943989C185592680 @default.
- W2006943989 hasConceptScore W2006943989C191897082 @default.
- W2006943989 hasConceptScore W2006943989C192562407 @default.
- W2006943989 hasConceptScore W2006943989C199539241 @default.
- W2006943989 hasConceptScore W2006943989C2780901251 @default.
- W2006943989 hasConceptScore W2006943989C43617362 @default.
- W2006943989 hasConceptScore W2006943989C49040817 @default.
- W2006943989 hasConceptScore W2006943989C544956773 @default.
- W2006943989 hasConceptScore W2006943989C57863236 @default.
- W2006943989 hasConceptScore W2006943989C62520636 @default.
- W2006943989 hasConceptScore W2006943989C69990965 @default.
- W2006943989 hasConceptScore W2006943989C74080474 @default.
- W2006943989 hasConceptScore W2006943989C8010536 @default.
- W2006943989 hasConceptScore W2006943989C94625758 @default.
- W2006943989 hasIssue "8" @default.
- W2006943989 hasLocation W20069439891 @default.
- W2006943989 hasOpenAccess W2006943989 @default.
- W2006943989 hasPrimaryLocation W20069439891 @default.
- W2006943989 hasRelatedWork W1984933142 @default.
- W2006943989 hasRelatedWork W1996779045 @default.
- W2006943989 hasRelatedWork W2006943989 @default.
- W2006943989 hasRelatedWork W2030962983 @default.
- W2006943989 hasRelatedWork W2081010284 @default.
- W2006943989 hasRelatedWork W2092654245 @default.
- W2006943989 hasRelatedWork W2318624391 @default.
- W2006943989 hasRelatedWork W2391593830 @default.
- W2006943989 hasRelatedWork W26885347 @default.
- W2006943989 hasRelatedWork W2774782538 @default.
- W2006943989 hasVolume "54" @default.
- W2006943989 isParatext "false" @default.
- W2006943989 isRetracted "false" @default.
- W2006943989 magId "2006943989" @default.
- W2006943989 workType "article" @default.